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8. A cylindrical micro ultrasonic motor using PZT thin film deposited by single process hydrothermal method (phi2.4 mm, L=10 mm stator transducer). Morita T; Kuribayashi Kurosawa M; Higuchi T IEEE Trans Ultrason Ferroelectr Freq Control; 1998; 45(5):1178-87. PubMed ID: 18244277 [TBL] [Abstract][Full Text] [Related]
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