457 related articles for article (PubMed ID: 17655282)
1. Atomic layer deposition and chemical vapor deposition precursor selection method application to strontium and barium precursors.
Holme TP; Prinz FB
J Phys Chem A; 2007 Aug; 111(33):8147-51. PubMed ID: 17655282
[TBL] [Abstract][Full Text] [Related]
2. Synthesis and characterisation of cyclopentadienyl complexes of barium: precursors for atomic layer deposition of BaTiO3.
Hatanpää T; Vehkamäki M; Mutikainen I; Kansikas J; Ritala M; Leskelä M
Dalton Trans; 2004 Apr; (8):1181-8. PubMed ID: 15252658
[TBL] [Abstract][Full Text] [Related]
3. Thermal stability of precursors for atomic layer deposition of TiO2, ZrO2, and HfO2: an ab initio study of alpha-hydrogen abstraction in bis-cyclopentadienyl dimethyl complexes.
Zydor A; Elliott SD
J Phys Chem A; 2010 Feb; 114(4):1879-86. PubMed ID: 20055493
[TBL] [Abstract][Full Text] [Related]
4. Atomic layer deposition of tungsten(III) oxide thin films from W2(NMe2)6 and water: precursor-based control of oxidation state in the thin film material.
Dezelah CL; El-Kadri OM; Szilágyi IM; Campbell JM; Arstila K; Niinistö L; Winter CH
J Am Chem Soc; 2006 Aug; 128(30):9638-9. PubMed ID: 16866511
[TBL] [Abstract][Full Text] [Related]
5. Novel titanium compounds for metal-organic chemical vapor deposition of titanium dioxide films with an ultrahigh deposition rate.
Woo K; Lee WI; Lee JS; Kang SO
Inorg Chem; 2003 Apr; 42(7):2378-83. PubMed ID: 12665373
[TBL] [Abstract][Full Text] [Related]
6. Homogeneous decomposition of aryl- and alkylimido precursors for the chemical vapor deposition of tungsten nitride: a combined density functional theory and experimental study.
Won YS; Kim YS; Anderson TJ; Reitfort LL; Ghiviriga I; McElwee-White L
J Am Chem Soc; 2006 Oct; 128(42):13781-8. PubMed ID: 17044706
[TBL] [Abstract][Full Text] [Related]
7. Volatility, high thermal stability, and low melting points in heavier alkaline earth metal complexes containing tris(pyrazolyl)borate ligands.
Saly MJ; Heeg MJ; Winter CH
Inorg Chem; 2009 Jun; 48(12):5303-12. PubMed ID: 19397286
[TBL] [Abstract][Full Text] [Related]
8. Comparison of the Atomic Layer Deposition of Tantalum Oxide Thin Films Using Ta(N
Song SJ; Park T; Yoon KJ; Yoon JH; Kwon DE; Noh W; Lansalot-Matras C; Gatineau S; Lee HK; Gautam S; Cho DY; Lee SW; Hwang CS
ACS Appl Mater Interfaces; 2017 Jan; 9(1):537-547. PubMed ID: 27936581
[TBL] [Abstract][Full Text] [Related]
9. Cooperative binding of phosphate anion and a neutral nitrogen donor to alkaline-Earth metal ions. Investigation of group 2 metal-organophosphate interaction in the absence and presence of 1,10-phenanthroline.
Murugavel R; Kuppuswamy S; Randoll S
Inorg Chem; 2008 Jul; 47(13):6028-39. PubMed ID: 18500795
[TBL] [Abstract][Full Text] [Related]
10. Ce(IV) complexes with donor-functionalized alkoxide ligands: improved precursors for chemical vapor deposition of CeO2.
Aspinall HC; Bacsa J; Jones AC; Wrench JS; Black K; Chalker PR; King PJ; Marshall P; Werner M; Davies HO; Odedra R
Inorg Chem; 2011 Nov; 50(22):11644-52. PubMed ID: 22017450
[TBL] [Abstract][Full Text] [Related]
11. In situ quadrupole mass spectrometry study of atomic-layer deposition of ZrO2 using Cp2Zr(CH3)2 and water.
Niinistö J; Rahtu A; Putkonen M; Ritala M; Leskelä M; Niinistö L
Langmuir; 2005 Aug; 21(16):7321-5. PubMed ID: 16042461
[TBL] [Abstract][Full Text] [Related]
12. Superbulky metallocene complexes of the heavier alkaline-earth metals strontium and barium.
Orzechowski L; Piesik DF; Ruspic C; Harder S
Dalton Trans; 2008 Sep; (35):4742-6. PubMed ID: 18728882
[TBL] [Abstract][Full Text] [Related]
13. New insights into the polymerization of methyl methacrylate initiated by rare-earth borohydride complexes: a combined experimental and computational approach.
Barros N; Schappacher M; Dessuge P; Maron L; Guillaume SM
Chemistry; 2008; 14(6):1881-90. PubMed ID: 18069715
[TBL] [Abstract][Full Text] [Related]
14. Synthesis and characterisation of zirconium-amido guanidinato complex: a potential precursor for ZrO2 thin films.
Devi A; Bhakta R; Milanov A; Hellwig M; Barreca D; Tondello E; Thomas R; Ehrhart P; Winter M; Fischer R
Dalton Trans; 2007 May; (17):1671-6. PubMed ID: 17443259
[TBL] [Abstract][Full Text] [Related]
15. Facile construction of the guanidine substituent or guanidinate anionic ligand through addition of the adjacent amino group to carbodiimide.
Zhang J; Ma L; Han Y; Zhang FH; Cai R; Chen Z; Zhou X
Dalton Trans; 2009 May; (17):3298-305. PubMed ID: 19421632
[TBL] [Abstract][Full Text] [Related]
16. Tungsten imido complexes as precursors to tungsten carbonitride thin films.
Potts SE; Carmalt CJ; Blackman CS; Leese T; Davies HO
Dalton Trans; 2008 Nov; (42):5730-6. PubMed ID: 18941660
[TBL] [Abstract][Full Text] [Related]
17. Atomic layer deposition of metal tellurides and selenides using alkylsilyl compounds of tellurium and selenium.
Pore V; Hatanpää T; Ritala M; Leskelä M
J Am Chem Soc; 2009 Mar; 131(10):3478-80. PubMed ID: 19123860
[TBL] [Abstract][Full Text] [Related]
18. Study of bismuth alkoxides as possible precursors for ALD.
Hatanpää T; Vehkamäki M; Ritala M; Leskelä M
Dalton Trans; 2010 Apr; 39(13):3219-26. PubMed ID: 20449450
[TBL] [Abstract][Full Text] [Related]
19. First-principles analyses and predictions on the reactivity of barrier layers of Ta and TaN toward organometallic precursors for deposition of copper films.
Machado E; Kaczmarski M; Ordejón P; Garg D; Norman J; Cheng H
Langmuir; 2005 Aug; 21(16):7608-14. PubMed ID: 16042500
[TBL] [Abstract][Full Text] [Related]
20. Synthesis and structural variations of substituted phenylamide complexes of the heavy alkaline earth metals calcium, strontium and barium.
Gärtner M; Görls H; Westerhausen M
Dalton Trans; 2008 Mar; (12):1574-82. PubMed ID: 18335141
[TBL] [Abstract][Full Text] [Related]
[Next] [New Search]
