167 related articles for article (PubMed ID: 18301694)
1. Phase effects owing to multilayer coatings in a two-mirror extreme-ultraviolet schwarzschild objective.
Tejnil E; Goldberg KA; Bokor J
Appl Opt; 1998 Dec; 37(34):8021-9. PubMed ID: 18301694
[TBL] [Abstract][Full Text] [Related]
2. Optical analysis of an ultra-high resolution two-mirror soft x-ray microscope.
Shealy DL; Wang C; Hoover RB
J Xray Sci Technol; 1995 Jan; 5(1):1-19. PubMed ID: 21307473
[TBL] [Abstract][Full Text] [Related]
3. Multilayer-coating-induced aberrations in extreme-ultraviolet lithography optics.
Liang C; Descour MR; Sasian JM; Lerner SA
Appl Opt; 2001 Jan; 40(1):129-35. PubMed ID: 18356983
[TBL] [Abstract][Full Text] [Related]
4. Wave-front correction methods for extreme-ultraviolet multilayer reflectors.
Singh M; Bal MF; Braat JJ; Joyeux D; Dinger U
Appl Opt; 2003 Apr; 42(10):1847-51. PubMed ID: 12683765
[TBL] [Abstract][Full Text] [Related]
5. Multilayer reflecting x-ray optical systems: chromatic vignetting by narrow reflection bands.
Berreman DW
Appl Opt; 1991 May; 30(13):1741-5. PubMed ID: 20700352
[TBL] [Abstract][Full Text] [Related]
6. Phase-shifting point-diffraction interferometry at 193 nm.
Lee SH; Naulleau P; Goldberg KA; Piao F; Oldham W; Bokar J
Appl Opt; 2000 Nov; 39(31):5768-72. PubMed ID: 18354576
[TBL] [Abstract][Full Text] [Related]
7. Extreme-ultraviolet lensless Fourier-transform holography.
Lee SH; Naulleau P; Goldberg KA; Cho CH; Jeong S; Bokor J
Appl Opt; 2001 Jun; 40(16):2655-61. PubMed ID: 18357280
[TBL] [Abstract][Full Text] [Related]
8. Coating-induced wave-front aberrations: on-axis astigmatism and chromatic aberration in all-reflecting systems.
Reiley DJ; Chipman RA
Appl Opt; 1994 Apr; 33(10):2002-12. PubMed ID: 20885536
[TBL] [Abstract][Full Text] [Related]
9. Sub-diffraction-limited multilayer coatings for the 0.3 numerical aperture micro-exposure tool for extreme ultraviolet lithography.
Soufli R; Hudyma RM; Spiller E; Gullikson EM; Schmidt MA; Robinson JC; Baker SL; Walton CC; Taylor JS
Appl Opt; 2007 Jun; 46(18):3736-46. PubMed ID: 17538670
[TBL] [Abstract][Full Text] [Related]
10. Effects of mo/si multilayer coatings on the imaging characteristics of an extreme-ultraviolet lithography system.
Duddles NJ
Appl Opt; 1998 Jun; 37(16):3533-8. PubMed ID: 18273320
[TBL] [Abstract][Full Text] [Related]
11. High-performance Mo-Si multilayer coatings for extreme-ultraviolet lithography by ion-beam deposition.
Spiller E; Baker SL; Mirkarimi PB; Sperry V; Gullikson EM; Stearns DG
Appl Opt; 2003 Jul; 42(19):4049-58. PubMed ID: 12868847
[TBL] [Abstract][Full Text] [Related]
12. Sub-quarter-wave multilayer coatings with high reflectance in the extreme ultraviolet.
Larruquert JI; Keski-Kuha RA
Appl Opt; 2002 Sep; 41(25):5398-404. PubMed ID: 12211570
[TBL] [Abstract][Full Text] [Related]
13. Thickness uniformity measurements and damage threshold tests of large-area GaAs/AlGaAs crystalline coatings for precision interferometry.
Koch P; Cole GD; Deutsch C; Follman D; Heu P; Kinley-Hanlon M; Kirchhoff R; Leavey S; Lehmann J; Oppermann P; Rai AK; Tornasi Z; Wöhler J; Wu DS; Zederbauer T; Lück H
Opt Express; 2019 Dec; 27(25):36731-36740. PubMed ID: 31873446
[TBL] [Abstract][Full Text] [Related]
14. Extreme ultraviolet multilayer mirror with near-zero IR reflectance.
Soer WA; Gawlitza P; van Herpen MM; Jak MJ; Braun S; Muys P; Banine VY
Opt Lett; 2009 Dec; 34(23):3680-2. PubMed ID: 19953160
[TBL] [Abstract][Full Text] [Related]
15. Atomic force microscopy characterization of Zerodur mirror substrates for the extreme ultraviolet telescopes aboard NASA's Solar Dynamics Observatory.
Soufli R; Baker SL; Windt DL; Gullikson EM; Robinson JC; Podgorski WA; Golub L
Appl Opt; 2007 Jun; 46(16):3156-63. PubMed ID: 17514269
[TBL] [Abstract][Full Text] [Related]
16. Multilayer coated grazing incidence condenser for large numerical aperture objective at wavelength of 4.5 nm.
Ejima T; Hatano T; Ohno K; Fukayama T; Aihara S; Yanagihara M; Tsuru T
Appl Opt; 2014 Oct; 53(29):6846-52. PubMed ID: 25322392
[TBL] [Abstract][Full Text] [Related]
17. Multilayer coatings for narrow-band imaging in the extreme ultraviolet.
Larruquert JI; Keski-Kuha RA
Appl Opt; 2001 Mar; 40(7):1126-31. PubMed ID: 18357097
[TBL] [Abstract][Full Text] [Related]
18. Subwavelength single layer absorption resonance antireflection coatings.
Huber SP; van de Kruijs RW; Yakshin AE; Zoethout E; Boller KJ; Bijkerk F
Opt Express; 2014 Jan; 22(1):490-7. PubMed ID: 24515009
[TBL] [Abstract][Full Text] [Related]
19. Design, fabrication, and analysis of chirped multilayer mirrors for reflection of extreme-ultraviolet attosecond pulses.
Wonisch A; Neuhäusler U; Kabachnik NM; Uphues T; Uiberacker M; Yakovlev V; Krausz F; Drescher M; Kleineberg U; Heinzmann U
Appl Opt; 2006 Jun; 45(17):4147-56. PubMed ID: 16761058
[TBL] [Abstract][Full Text] [Related]
20. Damage threshold measurements on EUV optics using focused radiation from a table-top laser produced plasma source.
Barkusky F; Bayer A; Döring S; Grossmann P; Mann K
Opt Express; 2010 Mar; 18(5):4346-55. PubMed ID: 20389446
[TBL] [Abstract][Full Text] [Related]
[Next] [New Search]