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4. Efficiencies of master, replica, and multilayer gratings for the soft-x-ray-extreme-ultraviolet range: modeling based on the modified integral method and comparisons with measurements. Goray LI; Seely JF Appl Opt; 2002 Mar; 41(7):1434-45. PubMed ID: 11900024 [TBL] [Abstract][Full Text] [Related]
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