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24. Wavefront aberration measurement method for a hyper-NA lithographic projection lens based on principal component analysis of an aerial image. Zhu B; Wang X; Li S; Yan G; Shen L; Duan L Appl Opt; 2016 Apr; 55(12):3192-8. PubMed ID: 27140087 [TBL] [Abstract][Full Text] [Related]
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