These tools will no longer be maintained as of December 31, 2024. Archived website can be found here. PubMed4Hh GitHub repository can be found here. Contact NLM Customer Service if you have questions.
119 related articles for article (PubMed ID: 19441387)
1. Study of nitrogen diffusion profile of low resistivity diffusion barrier by resputtering technology. Tsao JC; Liu CP; Wang YL; Chen KW J Nanosci Nanotechnol; 2009 Feb; 9(2):759-63. PubMed ID: 19441387 [TBL] [Abstract][Full Text] [Related]
2. Direct alpha Ta formation on TaN by resputtering for low resistive diffusion barriers. Tsao JC; Liu CP; Wang YL; Chen KW J Nanosci Nanotechnol; 2008 May; 8(5):2582-7. PubMed ID: 18572688 [TBL] [Abstract][Full Text] [Related]
3. Effect of under-layer treatment of Ta/TaN barrier film on corrosion between Cu seed and Ta in chemical-mechanical-polishing slurry. Lee WH; Hung CC; Wang YS; Chang SC; Wang YL J Nanosci Nanotechnol; 2010 Jul; 10(7):4196-203. PubMed ID: 21128400 [TBL] [Abstract][Full Text] [Related]
4. Enhancing Interconnect Reliability and Performance by Converting Tantalum to 2D Layered Tantalum Sulfide at Low Temperature. Lo CL; Catalano M; Khosravi A; Ge W; Ji Y; Zemlyanov DY; Wang L; Addou R; Liu Y; Wallace RM; Kim MJ; Chen Z Adv Mater; 2019 Jul; 31(30):e1902397. PubMed ID: 31183907 [TBL] [Abstract][Full Text] [Related]
5. Recent Advances in Barrier Layer of Cu Interconnects. Li Z; Tian Y; Teng C; Cao H Materials (Basel); 2020 Nov; 13(21):. PubMed ID: 33182434 [TBL] [Abstract][Full Text] [Related]
6. Fabrication of tantalum and nitrogen codoped ZnO (Ta, N-ZnO) thin films using the electrospay: twin applications as an excellent transparent electrode and a field emitter. Mahmood K; Park SB; Sung HJ ACS Appl Mater Interfaces; 2013 May; 5(9):3722-30. PubMed ID: 23547983 [TBL] [Abstract][Full Text] [Related]
7. Microstructural evolution of tantalum nitride thin films synthesized by inductively coupled plasma sputtering. Baik SI; Kim YW Appl Microsc; 2020 Feb; 50(1):7. PubMed ID: 33580437 [TBL] [Abstract][Full Text] [Related]
8. Robust Co alloy design for Co interconnects using a self-forming barrier layer. Kim C; Kang G; Jung Y; Kim JY; Lee GB; Hong D; Lee Y; Hwang SG; Jung IH; Joo YC Sci Rep; 2022 Jul; 12(1):12291. PubMed ID: 35853980 [TBL] [Abstract][Full Text] [Related]
9. Preparation of taN thin film by H2 plasma assisted atomic layer deposition using tert-butylimino-tris-ethylmethylamino tantalum. Kim DK; Kim BH; Woo HG; Kim DH; Shin HK J Nanosci Nanotechnol; 2006 Nov; 6(11):3392-5. PubMed ID: 17252773 [TBL] [Abstract][Full Text] [Related]
10. Structural Stability of Diffusion Barriers in Cu/Ru/MgO/Ta/Si. Hsieh SH; Chen WJ; Chien CM Nanomaterials (Basel); 2015 Nov; 5(4):1840-1852. PubMed ID: 28347099 [TBL] [Abstract][Full Text] [Related]
11. Thermal stability of atomic layer deposited Ru layer on Si and TaN/Si for barrier application of Cu interconnection. Shin DC; Kim MR; Lee JH; Choi BH; Lee HK J Nanosci Nanotechnol; 2012 Jul; 12(7):5631-7. PubMed ID: 22966623 [TBL] [Abstract][Full Text] [Related]
12. Amorphous Ta An BS; Kwon Y; Oh JS; Lee M; Pae S; Yang CW Sci Rep; 2019 Dec; 9(1):20132. PubMed ID: 31882921 [TBL] [Abstract][Full Text] [Related]
13. The influence of an ultra-high resistivity Ta underlayer on perpendicular magnetic anisotropy in Ta/Pt/Co/Pt heterostructures. Zhang W; Jia X; Wang R; Liu H; Xiao Z; Quan Z; Xu X RSC Adv; 2020 Mar; 10(19):11219-11224. PubMed ID: 35495312 [TBL] [Abstract][Full Text] [Related]
14. Plasma-Enhanced Atomic Layer Deposition of Cobalt Films Using Co(EtCp) Zhu B; Ding ZJ; Wu X; Liu WJ; Zhang DW; Ding SJ Nanoscale Res Lett; 2019 Mar; 14(1):76. PubMed ID: 30830476 [TBL] [Abstract][Full Text] [Related]
15. Crystallographic Structure Analysis of a Ti-Ta Thin Film Materials Library Fabricated by Combinatorial Magnetron Sputtering. Kadletz PM; Motemani Y; Iannotta J; Salomon S; Khare C; Grossmann L; Maier HJ; Ludwig A; Schmahl WW ACS Comb Sci; 2018 Mar; 20(3):137-150. PubMed ID: 29356502 [TBL] [Abstract][Full Text] [Related]
17. Interaction between sputtered beta-Ta films and diamond-like carbon with Ru intermediate layer. Wang J; Zhang S; Li Y; Zhao J; Zhu L; Yao F J Nanosci Nanotechnol; 2010 Jul; 10(7):4644-9. PubMed ID: 21128472 [TBL] [Abstract][Full Text] [Related]
18. The role of Ru passivation and doping on the barrier and seed layer properties of Ru-modified TaN for copper interconnects. Kondati Natarajan S; Nies CL; Nolan M J Chem Phys; 2020 Apr; 152(14):144701. PubMed ID: 32295379 [TBL] [Abstract][Full Text] [Related]
19. Metal-metal bonding in ScTaN2. A new compound in the system ScN-TaN. Niewa R; Zherebtsov DA; Schnelle W; Wagner FR Inorg Chem; 2004 Oct; 43(20):6188-94. PubMed ID: 15446863 [TBL] [Abstract][Full Text] [Related]