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5. Modeling of a high force density fishbone shaped electrostatic comb drive microactuator. Megat Hasnan MM; Mohd Sabri MF; Mohd Said S; Nik Ghazali NN ScientificWorldJournal; 2014; 2014():912683. PubMed ID: 25165751 [TBL] [Abstract][Full Text] [Related]
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