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4. Multilayer coated grazing incidence condenser for large numerical aperture objective at wavelength of 4.5 nm. Ejima T; Hatano T; Ohno K; Fukayama T; Aihara S; Yanagihara M; Tsuru T Appl Opt; 2014 Oct; 53(29):6846-52. PubMed ID: 25322392 [TBL] [Abstract][Full Text] [Related]
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