16 related articles for article (PubMed ID: 20720856)
1. Low-temperature deposition of high-quality silicon oxynitride films for CMOS-integrated optics.
Rangarajan B; Kovalgin AY; Wörhoff K; Schmitz J
Opt Lett; 2013 Mar; 38(6):941-3. PubMed ID: 23503267
[TBL] [Abstract][Full Text] [Related]
2. Plasma-enhanced chemical vapor deposition of low-loss SiON optical waveguides at 15-microm wavelength.
Bruno F; Guidice MD; Recca R; Testa F
Appl Opt; 1991 Nov; 30(31):4560-4. PubMed ID: 20717249
[TBL] [Abstract][Full Text] [Related]
3. Silicon oxynitride films on fused silica for optical waveguides.
Rand MJ; Standley RD
Appl Opt; 1972 Nov; 11(11):2482-8. PubMed ID: 20119361
[TBL] [Abstract][Full Text] [Related]
4. PECVD based silicon oxynitride thin films for nano photonic on chip interconnects applications.
Sharma SK; Barthwal S; Singh V; Kumar A; Dwivedi PK; Prasad B; Kumar D
Micron; 2013 Jan; 44():339-46. PubMed ID: 23092929
[TBL] [Abstract][Full Text] [Related]
5. Silicon nitride films on silicon for optical waveguides.
Stutius W; Streifer W
Appl Opt; 1977 Dec; 16(12):3218-22. PubMed ID: 20174332
[TBL] [Abstract][Full Text] [Related]
6. Low-pressure chemical vapor deposition silicon-oxynitride films for integrated optics.
Gleine W; Müller J
Appl Opt; 1992 Apr; 31(12):2036-40. PubMed ID: 20720856
[TBL] [Abstract][Full Text] [Related]
7. A Review: Preparation, Performance, and Applications of Silicon Oxynitride Film.
Shi Y; He L; Guang F; Li L; Xin Z; Liu R
Micromachines (Basel); 2019 Aug; 10(8):. PubMed ID: 31434246
[TBL] [Abstract][Full Text] [Related]
8.
; ; . PubMed ID:
[No Abstract] [Full Text] [Related]
9.
; ; . PubMed ID:
[No Abstract] [Full Text] [Related]
10.
; ; . PubMed ID:
[No Abstract] [Full Text] [Related]
11.
; ; . PubMed ID:
[No Abstract] [Full Text] [Related]
12.
; ; . PubMed ID:
[No Abstract] [Full Text] [Related]
13.
; ; . PubMed ID:
[No Abstract] [Full Text] [Related]
14.
; ; . PubMed ID:
[No Abstract] [Full Text] [Related]
15.
; ; . PubMed ID:
[No Abstract] [Full Text] [Related]
16.
; ; . PubMed ID:
[No Abstract] [Full Text] [Related]
[Next] [New Search]
