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5. Radiation hardness of molybdenum silicon multilayers designed for use in a soft-x-ray projection lithography system. Gaines DP; Spitzer RC; Ceglio NM; Krumrey M; Ulm G Appl Opt; 1993 Dec; 32(34):6991-8. PubMed ID: 20856557 [TBL] [Abstract][Full Text] [Related]
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