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3. Microscale features and surface chemical functionality patterned by electron beam lithography: a novel route to poly(dimethylsiloxane) (PDMS) stamp fabrication. Russell MT; Pingree LS; Hersam MC; Marks TJ Langmuir; 2006 Jul; 22(15):6712-8. PubMed ID: 16831018 [TBL] [Abstract][Full Text] [Related]
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