254 related articles for article (PubMed ID: 20856551)
1. Multilayer mirror technology for soft-x-ray projection lithography.
Stearns DG; Rosen RS; Vernon SP
Appl Opt; 1993 Dec; 32(34):6952-60. PubMed ID: 20856551
[TBL] [Abstract][Full Text] [Related]
2. Power loading limitations in soft x-ray projection lithography.
Hawryluk AM; Ceglio NM
J Xray Sci Technol; 1994 Jan; 4(3):167-81. PubMed ID: 21307490
[TBL] [Abstract][Full Text] [Related]
3. High-Performance Mo/Si and W/B4C Multilayer Mirrors for Soft X-Ray Imaging Optics.
Gutman G
J Xray Sci Technol; 1994 Jan; 4(2):142-50. PubMed ID: 21307461
[TBL] [Abstract][Full Text] [Related]
4. Optical analysis of an ultra-high resolution two-mirror soft x-ray microscope.
Shealy DL; Wang C; Hoover RB
J Xray Sci Technol; 1995 Jan; 5(1):1-19. PubMed ID: 21307473
[TBL] [Abstract][Full Text] [Related]
5. Wolter type I x-ray focusing mirror using multilayer coatings.
Chon KS; Namba Y; Yoon KH
Appl Opt; 2006 Jul; 45(19):4609-16. PubMed ID: 16799673
[TBL] [Abstract][Full Text] [Related]
6. Radiation hardness of molybdenum silicon multilayers designed for use in a soft-x-ray projection lithography system.
Gaines DP; Spitzer RC; Ceglio NM; Krumrey M; Ulm G
Appl Opt; 1993 Dec; 32(34):6991-8. PubMed ID: 20856557
[TBL] [Abstract][Full Text] [Related]
7. Design of a normal incidence multilayer imaging x-ray microscope.
Shealy DL; Gabardi DR; Hoover RB; Walker AB; Lindblom JF; Barbee TW
J Xray Sci Technol; 1989 Jan; 1(2):190-206. PubMed ID: 21307411
[TBL] [Abstract][Full Text] [Related]
8. Properties of broadband depth-graded multilayer mirrors for EUV optical systems.
Yakshin AE; Kozhevnikov IV; Zoethout E; Louis E; Bijkerk F
Opt Express; 2010 Mar; 18(7):6957-71. PubMed ID: 20389715
[TBL] [Abstract][Full Text] [Related]
9. High-performance Mo-Si multilayer coatings for extreme-ultraviolet lithography by ion-beam deposition.
Spiller E; Baker SL; Mirkarimi PB; Sperry V; Gullikson EM; Stearns DG
Appl Opt; 2003 Jul; 42(19):4049-58. PubMed ID: 12868847
[TBL] [Abstract][Full Text] [Related]
10. Fabrication and testing of large area multilayer coated x-ray optics.
Spiller E; Golub L
Appl Opt; 1989 Jul; 28(14):2969-74. PubMed ID: 20555633
[TBL] [Abstract][Full Text] [Related]
11. Comparative Study on Microstructure of Mo/Si Multilayers Deposited on Large Curved Mirror with and without the Shadow Mask.
Liu X; Zhang Z; Song H; Huang Q; Huo T; Zhou H; Qi R; Zhang Z; Wang Z
Micromachines (Basel); 2023 Feb; 14(3):. PubMed ID: 36984933
[TBL] [Abstract][Full Text] [Related]
12. Applications of non-periodic multilayer optics for high-resolution x-ray microscopes below 30 keV.
Troussel P; Dennetiere D; Rousseau A; Darbon S; Høghøj P; Hedacq S; Krumrey M
Rev Sci Instrum; 2012 Oct; 83(10):10E533. PubMed ID: 23127039
[TBL] [Abstract][Full Text] [Related]
13. Platinum/carbon multilayer reflectors for soft-x-ray optics.
Lodha GS; Yamashita K; Suzuki T; Hatsukade I; Tamura K; Ishigami T; Takahama S; Namba Y
Appl Opt; 1994 Sep; 33(25):5869-74. PubMed ID: 20935990
[TBL] [Abstract][Full Text] [Related]
14. Multilayer coated grazing incidence condenser for large numerical aperture objective at wavelength of 4.5 nm.
Ejima T; Hatano T; Ohno K; Fukayama T; Aihara S; Yanagihara M; Tsuru T
Appl Opt; 2014 Oct; 53(29):6846-52. PubMed ID: 25322392
[TBL] [Abstract][Full Text] [Related]
15. Design and fabrication of highly heat-resistant Mo/Si multilayer soft X-ray mirrors with interleaved barrier layers.
Takenaka H; Ito H; Haga T; Kawamura T
J Synchrotron Radiat; 1998 May; 5(Pt 3):708-10. PubMed ID: 15263627
[TBL] [Abstract][Full Text] [Related]
16. Wavelength considerations in soft-x-ray projection lithography.
Hawryluk AM; Ceglio NM
Appl Opt; 1993 Dec; 32(34):7062-7. PubMed ID: 20856568
[TBL] [Abstract][Full Text] [Related]
17. [Development of soft X-ray multilayer mirror at 23.4 nm].
Liu Z; Li X; Ma YY; Chen B; Cao JL
Guang Pu Xue Yu Guang Pu Fen Xi; 2011 Apr; 31(4):1138-41. PubMed ID: 21714278
[TBL] [Abstract][Full Text] [Related]
18. Tarnishing of Mo/Si multilayer x-ray mirrors.
Underwood JH; Gullikson EM; Nguyen K
Appl Opt; 1993 Dec; 32(34):6985-90. PubMed ID: 20856556
[TBL] [Abstract][Full Text] [Related]
19. Thermal and stress studies of normal incidence Mo/B4C multilayers for a 6.7 nm wavelength.
Barthelmess M; Bajt S
Appl Opt; 2011 Apr; 50(11):1610-9. PubMed ID: 21478937
[TBL] [Abstract][Full Text] [Related]
20. Multilayer X-ray optics at CHESS.
Kazimirov A; Smilgies DM; Shen Q; Xiao X; Hao Q; Fontes E; Bilderback DH; Gruner SM; Platonov Y; Martynov VV
J Synchrotron Radiat; 2006 Mar; 13(Pt 2):204-10. PubMed ID: 16495620
[TBL] [Abstract][Full Text] [Related]
[Next] [New Search]