These tools will no longer be maintained as of December 31, 2024. Archived website can be found here. PubMed4Hh GitHub repository can be found here. Contact NLM Customer Service if you have questions.
140 related articles for article (PubMed ID: 21690809)
1. Quantum chemical study of the initial surface reactions in atomic layer deposition of TiN on the SiO(2) surface. Lu HL; Chen W; Ding SJ; Xu M; Zhang DW; Wang LK J Phys Condens Matter; 2006 Jul; 18(26):5937-44. PubMed ID: 21690809 [TBL] [Abstract][Full Text] [Related]
2. Atomic layer deposition of TiO2 from TiI4 and H2O onto SiO2 surfaces: ab initio calculations of the initial reaction mechanisms. Hu Z; Turner CH J Am Chem Soc; 2007 Apr; 129(13):3863-78. PubMed ID: 17346043 [TBL] [Abstract][Full Text] [Related]
3. Hafnium oxide and zirconium oxide atomic layer deposition: initial precursor and potential side-reaction product pathways with H/Si(100)-2 x 1. Fenno RD; Halls MD; Raghavachari K J Phys Chem B; 2005 Mar; 109(11):4969-76. PubMed ID: 16863156 [TBL] [Abstract][Full Text] [Related]
4. Initial surface reactions of TiO2 atomic layer deposition onto SiO2 surfaces: density functional theory calculations. Hu Z; Turner CH J Phys Chem B; 2006 Apr; 110(16):8337-47. PubMed ID: 16623518 [TBL] [Abstract][Full Text] [Related]
5. Surface chemistry for molecular layer deposition of organic and hybrid organic-inorganic polymers. George SM; Yoon B; Dameron AA Acc Chem Res; 2009 Apr; 42(4):498-508. PubMed ID: 19249861 [TBL] [Abstract][Full Text] [Related]
6. Role of water in the atomic layer deposition of TiO(2) on SiO(2). Gu W; Tripp CP Langmuir; 2005 Jan; 21(1):211-6. PubMed ID: 15620305 [TBL] [Abstract][Full Text] [Related]
7. Surface chemistry in the atomic layer deposition of TiN films from TiCl4 and ammonia. Tiznado H; Zaera F J Phys Chem B; 2006 Jul; 110(27):13491-8. PubMed ID: 16821875 [TBL] [Abstract][Full Text] [Related]
8. Low-Temperature Conformal Atomic Layer Deposition of SiNx Films Using Si₂Cl₆ and NH₃ Plasma. Ovanesyan RA; Hausmann DM; Agarwal S ACS Appl Mater Interfaces; 2015 May; 7(20):10806-13. PubMed ID: 25927250 [TBL] [Abstract][Full Text] [Related]
9. Thermally activated mechanisms of hydrogen abstraction by growth precursors during plasma deposition of silicon thin films. Bakos T; Valipa MS; Maroudas D J Chem Phys; 2005 Feb; 122(5):54703. PubMed ID: 15740342 [TBL] [Abstract][Full Text] [Related]
10. Interactions between radical growth precursors on plasma-deposited silicon thin-film surfaces. Bakos T; Valipa MS; Maroudas D J Chem Phys; 2007 Mar; 126(11):114704. PubMed ID: 17381225 [TBL] [Abstract][Full Text] [Related]
11. Surface and interface processes during atomic layer deposition of copper on silicon oxide. Dai M; Kwon J; Halls MD; Gordon RG; Chabal YJ Langmuir; 2010 Mar; 26(6):3911-7. PubMed ID: 20092316 [TBL] [Abstract][Full Text] [Related]
12. Preliminary studies in the electrodeposition of PbSe/PbTe superlattice thin films via electrochemical atomic layer deposition (ALD). Vaidyanathan R; Cox SM; Happek U; Banga D; Mathe MK; Stickney JL Langmuir; 2006 Dec; 22(25):10590-5. PubMed ID: 17129034 [TBL] [Abstract][Full Text] [Related]
13. Scanning tunneling spectroscopy of lead sulfide quantum wells fabricated by atomic layer deposition. Lee W; Dasgupta NP; Jung HJ; Lee JR; Sinclair R; Prinz FB Nanotechnology; 2010 Dec; 21(48):485402. PubMed ID: 21063050 [TBL] [Abstract][Full Text] [Related]
14. Ab initio calculations of the reaction mechanisms for metal-nitride deposition from organo-metallic precursors onto functionalized self-assembled monolayers. Haran M; Engstrom JR; Clancy P J Am Chem Soc; 2006 Jan; 128(3):836-47. PubMed ID: 16417373 [TBL] [Abstract][Full Text] [Related]
15. Quantum confinement in amorphous TiO(2) films studied via atomic layer deposition. King DM; Du X; Cavanagh AS; Weimer AW Nanotechnology; 2008 Nov; 19(44):445401. PubMed ID: 21832729 [TBL] [Abstract][Full Text] [Related]
16. ALD growth characteristics of ZnS films deposited from organozinc and hydrogen sulfide precursors. Tanskanen JT; Bakke JR; Bent SF; Pakkanen TA Langmuir; 2010 Jul; 26(14):11899-906. PubMed ID: 20553010 [TBL] [Abstract][Full Text] [Related]
17. Interaction of oxygen with TiN(001): N<-->O exchange and oxidation process. Graciani J; Fdez Sanz J; Asaki T; Nakamura K; Rodriguez JA J Chem Phys; 2007 Jun; 126(24):244713. PubMed ID: 17614583 [TBL] [Abstract][Full Text] [Related]
18. Mechanisms and energetics of hydride dissociation reactions on surfaces of plasma-deposited silicon thin films. Singh T; Valipa MS; Mountziaris TJ; Maroudas D J Chem Phys; 2007 Nov; 127(19):194703. PubMed ID: 18035894 [TBL] [Abstract][Full Text] [Related]
19. ALD/MLD of novel layer-engineered Zn-based inorganic-organic hybrid thin films using heterobifunctional 4-aminophenol as an organic precursor. Sood A; Sundberg P; Karppinen M Dalton Trans; 2013 Mar; 42(11):3869-75. PubMed ID: 23319066 [TBL] [Abstract][Full Text] [Related]
20. Chemisorption of silicon tetrachloride on silicon nitride: a density functional theory study. Chowdhury T; Khumaini K; Hidayat R; Kim HL; Lee WJ Phys Chem Chem Phys; 2024 Apr; 26(15):11597-11603. PubMed ID: 38536050 [TBL] [Abstract][Full Text] [Related] [Next] [New Search]