154 related articles for article (PubMed ID: 22109036)
1. Thermal stability of Mg/Co multilayer with B4C, Mo or Zr diffusion barrier layers.
Zhu J; Zhou S; Li H; Wang Z; Jonnard P; Le Guen K; Hu MH; André JM; Zhou H; Huo T
Opt Express; 2011 Oct; 19(22):21849-54. PubMed ID: 22109036
[TBL] [Abstract][Full Text] [Related]
2. Thermal and stress studies of normal incidence Mo/B4C multilayers for a 6.7 nm wavelength.
Barthelmess M; Bajt S
Appl Opt; 2011 Apr; 50(11):1610-9. PubMed ID: 21478937
[TBL] [Abstract][Full Text] [Related]
3. Pd/B4C/Y multilayer coatings for extreme ultraviolet applications near 10 nm wavelength.
Windt DL; Gullikson EM
Appl Opt; 2015 Jun; 54(18):5850-60. PubMed ID: 26193039
[TBL] [Abstract][Full Text] [Related]
4. Performance, structure, and stability of SiC/Al multilayer films for extreme ultraviolet applications.
Windt DL; Bellotti JA
Appl Opt; 2009 Sep; 48(26):4932-41. PubMed ID: 19745857
[TBL] [Abstract][Full Text] [Related]
5. Optical and structural performance of the Al(1%wtSi)/Zr reflection multilayers in the 17-19nm region.
Zhong Q; Li W; Zhang Z; Zhu J; Huang Q; Li H; Wang Z; Jonnard P; Le Guen K; André JM; Zhou H; Huo T
Opt Express; 2012 May; 20(10):10692-700. PubMed ID: 22565694
[TBL] [Abstract][Full Text] [Related]
6. Thermal stability of sputtered Mo/X and W/X (X = BN:O, B(4)C:O, Si, and C) multilayer soft-x-ray mirrors.
Okada H; Mayama K; Goto Y; Kusunoki I; Yanagihara M
Appl Opt; 1994 Jul; 33(19):4219-24. PubMed ID: 20935776
[TBL] [Abstract][Full Text] [Related]
7. Design and fabrication of highly heat-resistant Mo/Si multilayer soft X-ray mirrors with interleaved barrier layers.
Takenaka H; Ito H; Haga T; Kawamura T
J Synchrotron Radiat; 1998 May; 5(Pt 3):708-10. PubMed ID: 15263627
[TBL] [Abstract][Full Text] [Related]
8. Experimental comparison of extreme-ultraviolet multilayers for solar physics.
Windt DL; Donguy S; Seely J; Kjornrattanawanich B
Appl Opt; 2004 Mar; 43(9):1835-48. PubMed ID: 15065713
[TBL] [Abstract][Full Text] [Related]
9. Thermal stability of soft x-ray Mo-Si and MoSi(2)-Si multilayer mirrors.
Kondratenko VV; Pershin YP; Poltseva OV; Fedorenko AI; Zubarev EN; Yulin SA; Kozhevnikov V; Sagitov SI; Chirkov VA; Levashov VE; Vinogradov AV
Appl Opt; 1993 Apr; 32(10):1811-6. PubMed ID: 20820316
[TBL] [Abstract][Full Text] [Related]
10. Structural properties of subnanometer thick Y layers in extreme ultraviolet multilayer mirrors.
Bosgra J; Zoethout E; van der Eerden AM; Verhoeven J; van de Kruijs RW; Yakshin AE; Bijkerk F
Appl Opt; 2012 Dec; 51(36):8541-8. PubMed ID: 23262592
[TBL] [Abstract][Full Text] [Related]
11. Thermal stability of Ti/Mo and Ti/MoN nanostructures for barrier applications in Cu interconnects.
Majumder P; Takoudis C
Nanotechnology; 2008 May; 19(20):205202. PubMed ID: 21825734
[TBL] [Abstract][Full Text] [Related]
12. Low-stress and high-reflectance Mo/Si multilayers for extreme ultraviolet lithography by magnetron sputtering deposition with bias assistance.
Yu B; Jin C; Yao S; Li C; Liu Y; Zhou F; Guo B; Wang H; Xie Y; Wang L
Appl Opt; 2017 Sep; 56(26):7462-7468. PubMed ID: 29048070
[TBL] [Abstract][Full Text] [Related]
13. Evolution of structure, phase composition, and x-ray reflectivity of multilayer mirrors mo-(B + C) after annealing at 250-1100°c.
Kopilets IA; Kondratenko VV; Fedorenko AI; Zubarev EN; Poltseva OV; Ponomarenko AG; Lyakhovskaya II
J Xray Sci Technol; 1996 Jan; 6(2):141-9. PubMed ID: 21307518
[TBL] [Abstract][Full Text] [Related]
14. Enhancement of the reflectivity of Al/Zr multilayers by a novel structure.
Zhong Q; Zhang Z; Qi R; Li J; Wang Z; Le Guen K; André JM; Jonnard P
Opt Express; 2013 Jun; 21(12):14399-408. PubMed ID: 23787628
[TBL] [Abstract][Full Text] [Related]
15. Thermal stability of a Co/Cu giant magnetoresistance (GMR) multilayer system.
Vovk V; Schmitz G
Ultramicroscopy; 2009 Apr; 109(5):637-43. PubMed ID: 19179012
[TBL] [Abstract][Full Text] [Related]
16. Comparison of thermal stability of Mo/Si multilayers with different crystallinities of Mo layers.
Song H; Zhang Z; Liu X; Huang Q; Zhou H; Huo T; Qi R; Zhang Z; Xin Z; Wang Z
Appl Opt; 2023 Apr; 62(10):2636-2641. PubMed ID: 37132813
[TBL] [Abstract][Full Text] [Related]
17. Performance optimization of Si/Gd extreme ultraviolet multilayers.
Windt DL; Bellotti JA; Kjornrattanawanich B; Seely JF
Appl Opt; 2009 Oct; 48(29):5502-8. PubMed ID: 19823233
[TBL] [Abstract][Full Text] [Related]
18. Microstructure of Mo/Si multilayers with B4C diffusion barrier layers.
Nedelcu I; van de Kruijs RW; Yakshin AE; Bijkerk F
Appl Opt; 2009 Jan; 48(2):155-60. PubMed ID: 19137023
[TBL] [Abstract][Full Text] [Related]
19. Stacked Ge nanocrystals with ultrathin SiO₂ separation layers.
Zschintzsch M; von Borany J; Jeutter NM; Mücklich A
Nanotechnology; 2011 Nov; 22(46):465302. PubMed ID: 22032974
[TBL] [Abstract][Full Text] [Related]
20. Thermal stability of high-k Si-rich HfO(2) layers grown by RF magnetron sputtering.
Khomenkova L; Portier X; Cardin J; Gourbilleau F
Nanotechnology; 2010 Jul; 21(28):285707. PubMed ID: 20585152
[TBL] [Abstract][Full Text] [Related]
[Next] [New Search]
