87 related articles for article (PubMed ID: 22299961)
1. Rapid measurement of a high step microstructure with 90° steep sidewall.
Ju BF; Chen YL; Zhang W; Fang FZ
Rev Sci Instrum; 2012 Jan; 83(1):013706. PubMed ID: 22299961
[TBL] [Abstract][Full Text] [Related]
2. Note: long range and accurate measurement of deep trench microstructures by a specialized scanning tunneling microscope.
Ju BF; Chen YL; Zhang W; Zhu W; Jin C; Fang FZ
Rev Sci Instrum; 2012 May; 83(5):056106. PubMed ID: 22667670
[TBL] [Abstract][Full Text] [Related]
3. Atomic force microscopy deep trench and sidewall imaging with an optical fiber probe.
Xie H; Hussain D; Yang F; Sun L
Rev Sci Instrum; 2014 Dec; 85(12):123704. PubMed ID: 25554298
[TBL] [Abstract][Full Text] [Related]
4. Atomic force microscope caliper for critical dimension measurements of micro and nanostructures through sidewall scanning.
Xie H; Hussain D; Yang F; Sun L
Ultramicroscopy; 2015 Nov; 158():8-16. PubMed ID: 26103045
[TBL] [Abstract][Full Text] [Related]
5. Observation of Si pattern sidewall using inclination atomic force microscope for evaluation of line edge roughness.
Hosaka S; Koyabu H; Noro M; Takizawa K; Sone H; Yin Y
J Nanosci Nanotechnol; 2010 Jul; 10(7):4522-7. PubMed ID: 21128451
[TBL] [Abstract][Full Text] [Related]
6. An alternative flat scanner and micropositioning method for scanning probe microscope.
Cai W; Shang G; Zhou Y; Xu P; Yao J
Rev Sci Instrum; 2010 Dec; 81(12):123701. PubMed ID: 21198026
[TBL] [Abstract][Full Text] [Related]
7. A technique for the non-destructive EUV mask sidewall angle measurement using scanning electron microscope.
Lee S; Lee J; Ban S; Oh HK; Nam B; Kim S; Yim D; Kim O
J Nanosci Nanotechnol; 2013 Dec; 13(12):8032-5. PubMed ID: 24266186
[TBL] [Abstract][Full Text] [Related]
8. Note: Symmetric modulation methodology applied in improving the performance of scanning tunneling microscopy.
Ju BF; Zhu WL; Zhang W
Rev Sci Instrum; 2013 Dec; 84(12):126107. PubMed ID: 24387483
[TBL] [Abstract][Full Text] [Related]
9. Reconstruction of a scanned topographic image distorted by the creep effect of a Z scanner in atomic force microscopy.
Han C; Chung CC
Rev Sci Instrum; 2011 May; 82(5):053709. PubMed ID: 21639509
[TBL] [Abstract][Full Text] [Related]
10. Optical fiber probe based on spherical coupling of light energy for inner-dimension measurement of microstructures with high aspect ratios.
Cui J; Li L; Tan J
Opt Lett; 2011 Dec; 36(23):4689-91. PubMed ID: 22139285
[TBL] [Abstract][Full Text] [Related]
11. Method for Keyhole-Free High-Aspect-Ratio Trench Refill by LPCVD.
Veltkamp HW; Janssens YL; de Boer MJ; Zhao Y; Wiegerink RJ; Tas NR; Lötters JC
Micromachines (Basel); 2022 Nov; 13(11):. PubMed ID: 36363929
[TBL] [Abstract][Full Text] [Related]
12. Three-dimensional imaging of undercut and sidewall structures by atomic force microscopy.
Cho SJ; Ahn BW; Kim J; Lee JM; Hua Y; Yoo YK; Park SI
Rev Sci Instrum; 2011 Feb; 82(2):023707. PubMed ID: 21361601
[TBL] [Abstract][Full Text] [Related]
13. Control of tip-to-sample distance in atomic force microscopy: a dual-actuator tip-motion control scheme.
Jeong Y; Jayanth GR; Menq CH
Rev Sci Instrum; 2007 Sep; 78(9):093706. PubMed ID: 17902954
[TBL] [Abstract][Full Text] [Related]
14. [Model-based FTIR reflectometry measurement system for deep trench structures of DRAM].
Liu SY; Zhang CW; Shen HW; Gu HY
Guang Pu Xue Yu Guang Pu Fen Xi; 2009 Apr; 29(4):935-9. PubMed ID: 19626876
[TBL] [Abstract][Full Text] [Related]
15. A 2D MEMS mirror with sidewall electrodes applied for confocal MACROscope imaging.
Bai Y; Pallapa M; Chen A; Constantinou P; Damaskinos S; Wilson BC; Yeow JT
J Microsc; 2012 Feb; 245(2):210-20. PubMed ID: 22092486
[TBL] [Abstract][Full Text] [Related]
16. Numerical and experimental investigation of kerf depth effect on high-frequency phased array transducer.
Zhang JY; Xu WJ; Carlier J; Ji XM; Queste S; Nongaillard B; Huang YP
Ultrasonics; 2012 Feb; 52(2):223-9. PubMed ID: 21907378
[TBL] [Abstract][Full Text] [Related]
17. A new nano-accuracy AFM system for minimizing Abbe errors and the evaluation of its measuring uncertainty.
Kim D; Lee DY; Gweon DG
Ultramicroscopy; 2007; 107(4-5):322-8. PubMed ID: 17055169
[TBL] [Abstract][Full Text] [Related]
18. Full area covered 3D profile measurement of special-shaped optics based on a new prototype non-contact profiler.
Du HL; Zhou ZZ; Sun ZQ; Ju BF; Xu S; Sun A
Rev Sci Instrum; 2017 Jun; 88(6):065102. PubMed ID: 28667981
[TBL] [Abstract][Full Text] [Related]
19. A linear piezoelectric stepper motor with submicrometer step size and centimeter travel range.
Judy JW; Polla DL; Robbins WP
IEEE Trans Ultrason Ferroelectr Freq Control; 1990; 37(5):428-37. PubMed ID: 18285060
[TBL] [Abstract][Full Text] [Related]
20. A method for measuring the size distribution of latex particles by scanning force microscopy.
Roe G; McDonnell L; Ghanem A
Ultramicroscopy; 2004 Aug; 100(3-4):319-29. PubMed ID: 15231325
[TBL] [Abstract][Full Text] [Related]
[Next] [New Search]
