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5. Detection and characterization of carbon contamination on EUV multilayer mirrors. Chen J; Louis E; Lee CJ; Wormeester H; Kunze R; Schmidt H; Schneider D; Moors R; van Schaik W; Lubomska M; Bijkerk F Opt Express; 2009 Sep; 17(19):16969-79. PubMed ID: 19770915 [TBL] [Abstract][Full Text] [Related]
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