150 related articles for article (PubMed ID: 23571898)
1. Efficient source and mask optimization with augmented Lagrangian methods in optical lithography.
Li J; Liu S; Lam EY
Opt Express; 2013 Apr; 21(7):8076-90. PubMed ID: 23571898
[TBL] [Abstract][Full Text] [Related]
2. Pixelated source mask optimization for process robustness in optical lithography.
Jia N; Lam EY
Opt Express; 2011 Sep; 19(20):19384-98. PubMed ID: 21996879
[TBL] [Abstract][Full Text] [Related]
3. Pixel-based OPC optimization based on conjugate gradients.
Ma X; Arce GR
Opt Express; 2011 Jan; 19(3):2165-80. PubMed ID: 21369034
[TBL] [Abstract][Full Text] [Related]
4. Fast nonlinear compressive sensing lithographic source and mask optimization method using Newton-IHTs algorithm.
Sun Y; Sheng N; Li T; Li Y; Li E; Wei P
Opt Express; 2019 Feb; 27(3):2754-2770. PubMed ID: 30732308
[TBL] [Abstract][Full Text] [Related]
5. Gradient-based source and mask optimization in optical lithography.
Peng Y; Zhang J; Wang Y; Yu Z
IEEE Trans Image Process; 2011 Oct; 20(10):2856-64. PubMed ID: 21435976
[TBL] [Abstract][Full Text] [Related]
6. Pixel-based simultaneous source and mask optimization for resolution enhancement in optical lithography.
Ma X; Arce GR
Opt Express; 2009 Mar; 17(7):5783-93. PubMed ID: 19333347
[TBL] [Abstract][Full Text] [Related]
7. Efficient sparse reconstruction algorithm for bioluminescence tomography based on duality and variable splitting.
Guo W; Jia K; Han D; Zhang Q; Liu X; Feng J; Qin C; Ma X; Tian J
Appl Opt; 2012 Aug; 51(23):5676-85. PubMed ID: 22885581
[TBL] [Abstract][Full Text] [Related]
8. Robust source and mask optimization compensating for mask topography effects in computational lithography.
Li J; Lam EY
Opt Express; 2014 Apr; 22(8):9471-85. PubMed ID: 24787836
[TBL] [Abstract][Full Text] [Related]
9. Efficient source mask optimization with Zernike polynomial functions for source representation.
Wu X; Liu S; Li J; Lam EY
Opt Express; 2014 Feb; 22(4):3924-37. PubMed ID: 24663713
[TBL] [Abstract][Full Text] [Related]
10. Mask optimization approaches in optical lithography based on a vector imaging model.
Ma X; Li Y; Dong L
J Opt Soc Am A Opt Image Sci Vis; 2012 Jul; 29(7):1300-12. PubMed ID: 22751396
[TBL] [Abstract][Full Text] [Related]
11. Efficient image reconstruction of high-density molecules with augmented Lagrangian method in super-resolution microscopy.
Li J; Chen D; Qu J
Opt Express; 2018 Sep; 26(19):24329-24342. PubMed ID: 30469554
[TBL] [Abstract][Full Text] [Related]
12. Pixelated source and mask optimization for immersion lithography.
Ma X; Han C; Li Y; Dong L; Arce GR
J Opt Soc Am A Opt Image Sci Vis; 2013 Jan; 30(1):112-23. PubMed ID: 23456007
[TBL] [Abstract][Full Text] [Related]
13. Hotspot-aware fast source and mask optimization.
Li J; Shen Y; Lam EY
Opt Express; 2012 Sep; 20(19):21792-804. PubMed ID: 23037299
[TBL] [Abstract][Full Text] [Related]
14. Fast image recovery using variable splitting and constrained optimization.
Afonso MV; Bioucas-Dias JM; Figueiredo MA
IEEE Trans Image Process; 2010 Sep; 19(9):2345-56. PubMed ID: 20378469
[TBL] [Abstract][Full Text] [Related]
15. Hybrid source mask optimization for robust immersion lithography.
Ma X; Han C; Li Y; Wu B; Song Z; Dong L; Arce GR
Appl Opt; 2013 Jun; 52(18):4200-11. PubMed ID: 23842161
[TBL] [Abstract][Full Text] [Related]
16. Robust hybrid source and mask optimization to lithography source blur and flare.
Han C; Li Y; Ma X; Liu L
Appl Opt; 2015 Jun; 54(17):5291-302. PubMed ID: 26192826
[TBL] [Abstract][Full Text] [Related]
17. Alternating direction methods for latent variable gaussian graphical model selection.
Ma S; Xue L; Zou H
Neural Comput; 2013 Aug; 25(8):2172-98. PubMed ID: 23607561
[TBL] [Abstract][Full Text] [Related]
18. Efficient informatics-based source and mask optimization for optical lithography.
Pan Y; Ma X; Zhang S; Garcia-Frias J; Arce GR
Appl Opt; 2021 Sep; 60(27):8307-8315. PubMed ID: 34612927
[TBL] [Abstract][Full Text] [Related]
19. Fast source optimization involving quadratic line-contour objectives for the resist image.
Yu JC; Yu P; Chao HY
Opt Express; 2012 Mar; 20(7):8161-74. PubMed ID: 22453486
[TBL] [Abstract][Full Text] [Related]
20. An SMO algorithm for the potential support vector machine.
Knebel T; Hochreiter S; Obermayer K
Neural Comput; 2008 Jan; 20(1):271-87. PubMed ID: 18045009
[TBL] [Abstract][Full Text] [Related]
[Next] [New Search]