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4. A self-sputtering ion source: a new approach to quiescent metal ion beams. Oks E; Anders A Rev Sci Instrum; 2010 Feb; 81(2):02B306. PubMed ID: 20192429 [TBL] [Abstract][Full Text] [Related]
5. Effects of gas pressure and discharge current on beam composition in a magnetron discharge ion source. Vizir A; Oks E; Shandrikov M; Zhang B; Yushkov G Rev Sci Instrum; 2019 Nov; 90(11):113312. PubMed ID: 31779380 [TBL] [Abstract][Full Text] [Related]
6. Ion beam composition in ion source based on magnetron sputtering discharge at extremely low working pressure. Vizir AV; Bugaev AS; Frolova VP; Gushenets VI; Nikolaev AG; Oks EM; Yushkov GY Rev Sci Instrum; 2022 Apr; 93(4):043304. PubMed ID: 35489919 [TBL] [Abstract][Full Text] [Related]
7. Broad-beam high-current dc ion source based on a two-stage glow discharge plasma. Vizir AV; Oks EM; Yushkov GY Rev Sci Instrum; 2010 Feb; 81(2):02B304. PubMed ID: 20192427 [TBL] [Abstract][Full Text] [Related]
8. Development of metal nanocluster ion source based on dc magnetron plasma sputtering at room temperature. Majumdar A; Köpp D; Ganeva M; Datta D; Bhattacharyya S; Hippler R Rev Sci Instrum; 2009 Sep; 80(9):095103. PubMed ID: 19791960 [TBL] [Abstract][Full Text] [Related]
9. Influence of ion source configuration and its operation parameters on the target sputtering and implantation process. Shalnov KV; Kukhta VR; Uemura K; Ito Y Rev Sci Instrum; 2012 Jun; 83(6):063304. PubMed ID: 22755619 [TBL] [Abstract][Full Text] [Related]
10. A hybrid electron cyclotron resonance metal ion source with integrated sputter magnetron for the production of an intense Al⁺ ion beam. Weichsel T; Hartung U; Kopte T; Zschornack G; Kreller M; Philipp A Rev Sci Instrum; 2015 Sep; 86(9):093301. PubMed ID: 26429434 [TBL] [Abstract][Full Text] [Related]
11. Hollow metal target magnetron sputter type radio frequency ion source. Yamada N; Kasuya T; Tsubouchi N; Wada M Rev Sci Instrum; 2014 Feb; 85(2):02C106. PubMed ID: 24593636 [TBL] [Abstract][Full Text] [Related]
12. Sputtering of pure boron using a magnetron without a radio-frequency supply. Oks E; Anders A; Nikolaev A; Yushkov Y Rev Sci Instrum; 2017 Apr; 88(4):043506. PubMed ID: 28456249 [TBL] [Abstract][Full Text] [Related]
14. Low-energy dc ion source for low operating pressure. Oks E; Shandrikov M; Salvadori C; Brown I Rev Sci Instrum; 2014 Aug; 85(8):083502. PubMed ID: 25173264 [TBL] [Abstract][Full Text] [Related]
15. Pseudo ribbon metal ion beam source. Stepanov IB; Ryabchikov AI; Sivin DO; Verigin DA Rev Sci Instrum; 2014 Feb; 85(2):02C104. PubMed ID: 24593634 [TBL] [Abstract][Full Text] [Related]
16. A fluid model of pulsed direct current planar magnetron discharge. Tran SBQ; Leong FY; Hariharaputran R; Le DV Sci Rep; 2023 Jun; 13(1):9017. PubMed ID: 37270594 [TBL] [Abstract][Full Text] [Related]
17. High current H2(+) and H3(+) beam generation by pulsed 2.45 GHz electron cyclotron resonance ion source. Xu Y; Peng S; Ren H; Zhao J; Chen J; Zhang A; Zhang T; Guo Z; Chen J Rev Sci Instrum; 2014 Feb; 85(2):02A943. PubMed ID: 24593522 [TBL] [Abstract][Full Text] [Related]
18. Enhancement in ion beam current with layered-glows in a constricted dc plasma ion source. Park YS; Hwang YS Rev Sci Instrum; 2010 Feb; 81(2):02B309. PubMed ID: 20192432 [TBL] [Abstract][Full Text] [Related]
19. Plasma electron source for the generation of wide-aperture pulsed beam at forevacuum pressures. Oks E; Burdovitsin V; Medovnik A; Yushkov Y Rev Sci Instrum; 2013 Feb; 84(2):023301. PubMed ID: 23464198 [TBL] [Abstract][Full Text] [Related]
20. A hollow cathode ion source for production of primary ions for the BNL electron beam ion source. Alessi J; Beebe E; Carlson C; McCafferty D; Pikin A; Ritter J Rev Sci Instrum; 2014 Feb; 85(2):02C107. PubMed ID: 24593637 [TBL] [Abstract][Full Text] [Related] [Next] [New Search]