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5. Phase stabilization by rapid thermal annealing in amorphous hydrogenated silicon nitride film. Singh SP; Srivastava P; Ghosh S; Khan SA; Vijaya Prakash G J Phys Condens Matter; 2009 Mar; 21(9):095010. PubMed ID: 21817383 [TBL] [Abstract][Full Text] [Related]
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