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4. Low-loss, flat-topped and spectrally uniform silicon-nanowire-based 5th-order CROW fabricated by ArF-immersion lithography process on a 300-mm SOI wafer. Jeong SH; Shimura D; Simoyama T; Seki M; Yokoyama N; Ohtsuka M; Koshino K; Horikawa T; Tanaka Y; Morito K Opt Express; 2013 Dec; 21(25):30163-74. PubMed ID: 24514595 [TBL] [Abstract][Full Text] [Related]
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