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13. Metasurface-generated complex 3-dimensional optical fields for interference lithography. Kamali SM; Arbabi E; Kwon H; Faraon A Proc Natl Acad Sci U S A; 2019 Oct; 116(43):21379-21384. PubMed ID: 31591229 [TBL] [Abstract][Full Text] [Related]
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