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2. Nanoscale characterization of different stiction mechanisms in electrostatically driven MEMS devices based on adhesion and friction measurements. Zaghloul U; Bhushan B; Pons P; Papaioannou GJ; Coccetti F; Plana R J Colloid Interface Sci; 2011 Jun; 358(1):1-13. PubMed ID: 21444091 [TBL] [Abstract][Full Text] [Related]
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