101 related articles for article (PubMed ID: 26366778)
1. Perturbative analysis of partially coherent illumination for coma aberration measurements.
Yashiki S
J Opt Soc Am A Opt Image Sci Vis; 2015 Apr; 32(4):669-77. PubMed ID: 26366778
[TBL] [Abstract][Full Text] [Related]
2. Theoretical analysis of coma aberration measurement for aerial image sidelobe peaks.
Suwa K; Yashiki S; Hirukawa S; Noda T
Appl Opt; 2014 Apr; 53(11):2494-506. PubMed ID: 24787423
[TBL] [Abstract][Full Text] [Related]
3. Parity decomposition theory of full wavefront aberration measurement using the intensity differences of aerial images in microlithography.
Yashiki S
Appl Opt; 2015 Jun; 54(17):5353-63. PubMed ID: 26192835
[TBL] [Abstract][Full Text] [Related]
4. Aerial image based technique for measurement of lens aberrations up to 37th Zernike coefficient in lithographic tools under partial coherent illumination.
Liu W; Liu S; Zhou T; Wang L
Opt Express; 2009 Oct; 17(21):19278-91. PubMed ID: 20372664
[TBL] [Abstract][Full Text] [Related]
5. Generalized formulations for aerial image based lens aberration metrology in lithographic tools with arbitrarily shaped illumination sources.
Liu W; Liu S; Shi T; Tang Z
Opt Express; 2010 Sep; 18(19):20096-104. PubMed ID: 20940899
[TBL] [Abstract][Full Text] [Related]
6. Effect of optical aberration on Gaussian speckle in a partially coherent imaging system.
Kang D; Milster TD
J Opt Soc Am A Opt Image Sci Vis; 2009 Dec; 26(12):2577-85. PubMed ID: 19956327
[TBL] [Abstract][Full Text] [Related]
7. Even aberration measurement of lithographic projection optics based on intensity difference of adjacent peaks in alternating phase-shifting mask image.
Peng B; Wang X; Qiu Z; Cao Y; Duan L
Appl Opt; 2010 May; 49(15):2753-60. PubMed ID: 20490235
[TBL] [Abstract][Full Text] [Related]
8. Numerical experiment of the Shannon entropy in partially coherent imaging by Koehler illumination to show the relationship to degree of coherence.
Yamazoe K; Neureuther AR
J Opt Soc Am A Opt Image Sci Vis; 2011 Mar; 28(3):448-54. PubMed ID: 21383828
[TBL] [Abstract][Full Text] [Related]
9. Coherent x-ray wavefront reconstruction of a partially illuminated Fresnel zone plate.
Mastropietro F; Carbone D; Diaz A; Eymery J; Sentenac A; Metzger TH; Chamard V; Favre-Nicolin V
Opt Express; 2011 Sep; 19(20):19223-32. PubMed ID: 21996864
[TBL] [Abstract][Full Text] [Related]
10. Aberration measurement technique based on an analytical linear model of a through-focus aerial image.
Yan G; Wang X; Li S; Yang J; Xu D; Erdmann A
Opt Express; 2014 Mar; 22(5):5623-34. PubMed ID: 24663903
[TBL] [Abstract][Full Text] [Related]
11. Depth extension and sidelobe suppression in optical coherence tomography using pupil filters.
Yu X; Liu X; Gu J; Cui D; Wu J; Liu L
Opt Express; 2014 Nov; 22(22):26956-66. PubMed ID: 25401845
[TBL] [Abstract][Full Text] [Related]
12. Coherence evolution of partially coherent beams carrying optical vortices propagating in non-Kolmogorov turbulence.
Qin Z; Tao R; Zhou P; Xu X; Liu Z
Appl Opt; 2013 Nov; 52(33):8176-83. PubMed ID: 24513775
[TBL] [Abstract][Full Text] [Related]
13. PSM design for inverse lithography with partially coherent illumination.
Ma X; Arce GR
Opt Express; 2008 Nov; 16(24):20126-41. PubMed ID: 19030098
[TBL] [Abstract][Full Text] [Related]
14. Method for the calculation of partially coherent imagery.
Kintner EC
Appl Opt; 1978 Sep; 17(17):2747-53. PubMed ID: 20203861
[TBL] [Abstract][Full Text] [Related]
15. Numerical refocusing in digital holographic microscopy with extended-sources illumination.
Týč M; Kvasnica L; Slabá M; Chmelík R
Opt Express; 2013 Nov; 21(23):28258-71. PubMed ID: 24514337
[TBL] [Abstract][Full Text] [Related]
16. Decomposition-learning-based thick-mask model for partially coherent lithography system.
Li Z; Dong L; Ma X; Wei Y
Opt Express; 2023 Jun; 31(12):20321-20337. PubMed ID: 37381429
[TBL] [Abstract][Full Text] [Related]
17. Condenser optics, partial coherence, and imaging for soft-x-ray projection lithography.
Sommargren GE; Seppala LG
Appl Opt; 1993 Dec; 32(34):6938-44. PubMed ID: 20856549
[TBL] [Abstract][Full Text] [Related]
18. Aberration-induced intensity imbalance of alternating phase-shifting mask in lithographic imaging.
Peng B; Wang X; Qiu Z; Yuan Q; Cao Y
Opt Lett; 2010 May; 35(9):1404-6. PubMed ID: 20436584
[TBL] [Abstract][Full Text] [Related]
19. Influence of partially coherent illumination on the performance of non-airy pupil functions in microscopic systems.
Som SC
Appl Opt; 1972 Mar; 11(3):655-61. PubMed ID: 20111563
[TBL] [Abstract][Full Text] [Related]
20. Quantitative phase retrieval with arbitrary pupil and illumination.
Claus RA; Naulleau PP; Neureuther AR; Waller L
Opt Express; 2015 Oct; 23(20):26672-82. PubMed ID: 26480180
[TBL] [Abstract][Full Text] [Related]
[Next] [New Search]