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6. Capacitive micromachined ultrasonic transducers: next-generation arrays for acoustic imaging? Oralkan O; Ergun AS; Johnson JA; Karaman M; Demirci U; Kaviani K; Lee TH; Khuri-Yakub BT IEEE Trans Ultrason Ferroelectr Freq Control; 2002 Nov; 49(11):1596-610. PubMed ID: 12484483 [TBL] [Abstract][Full Text] [Related]
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