138 related articles for article (PubMed ID: 29184150)
1. Control of the interaction strength of photonic molecules by nanometer precise 3D fabrication.
Rawlings CD; Zientek M; Spieser M; Urbonas D; Stöferle T; Mahrt RF; Lisunova Y; Brugger J; Duerig U; Knoll AW
Sci Rep; 2017 Nov; 7(1):16502. PubMed ID: 29184150
[TBL] [Abstract][Full Text] [Related]
2. Combining thermal scanning probe lithography and dry etching for grayscale nanopattern amplification.
Erbas B; Conde-Rubio A; Liu X; Pernollet J; Wang Z; Bertsch A; Penedo M; Fantner G; Banerjee M; Kis A; Boero G; Brugger J
Microsyst Nanoeng; 2024; 10():28. PubMed ID: 38405129
[TBL] [Abstract][Full Text] [Related]
3. Conversion of a Patterned Organic Resist into a High Performance Inorganic Hard Mask for High Resolution Pattern Transfer.
Marneffe JF; Chan BT; Spieser M; Vereecke G; Naumov S; Vanhaeren D; Wolf H; Knoll AW
ACS Nano; 2018 Nov; 12(11):11152-11160. PubMed ID: 30481961
[TBL] [Abstract][Full Text] [Related]
4. Sub-10 Nanometer Feature Size in Silicon Using Thermal Scanning Probe Lithography.
Ryu Cho YK; Rawlings CD; Wolf H; Spieser M; Bisig S; Reidt S; Sousa M; Khanal SR; Jacobs TDB; Knoll AW
ACS Nano; 2017 Dec; 11(12):11890-11897. PubMed ID: 29083870
[TBL] [Abstract][Full Text] [Related]
5. Fabrication of hierarchical micro/nanostructures via scanning probe lithography and wet chemical etching.
Choi I; Kim Y; Yi J
Ultramicroscopy; 2008 Sep; 108(10):1205-9. PubMed ID: 18583055
[TBL] [Abstract][Full Text] [Related]
6. Fabrication of Silicon Nanobelts and Nanopillars by Soft Lithography for Hydrophobic and Hydrophilic Photonic Surfaces.
Baquedano E; Martinez RV; Llorens JM; Postigo PA
Nanomaterials (Basel); 2017 May; 7(5):. PubMed ID: 28492474
[TBL] [Abstract][Full Text] [Related]
7. Ga(+) beam lithography for nanoscale silicon reactive ion etching.
Henry MD; Shearn MJ; Chhim B; Scherer A
Nanotechnology; 2010 Jun; 21(24):245303. PubMed ID: 20484788
[TBL] [Abstract][Full Text] [Related]
8. Mass Fabrication of 3D Silicon Nano-/Microstructures by Fab-Free Process Using Tip-Based Lithography.
Jo JS; Choi J; Lee SH; Song C; Noh H; Jang JW
Small; 2021 Jan; 17(4):e2005036. PubMed ID: 33369134
[TBL] [Abstract][Full Text] [Related]
9. Fast turnaround fabrication of silicon point-contact quantum-dot transistors using combined thermal scanning probe lithography and laser writing.
Rawlings C; Ryu YK; Rüegg M; Lassaline N; Schwemmer C; Duerig U; Knoll AW; Durrani Z; Wang C; Liu D; Jones ME
Nanotechnology; 2018 Dec; 29(50):505302. PubMed ID: 30248025
[TBL] [Abstract][Full Text] [Related]
10. Resistless EUV lithography: Photon-induced oxide patterning on silicon.
Tseng LT; Karadan P; Kazazis D; Constantinou PC; Stock TJZ; Curson NJ; Schofield SR; Muntwiler M; Aeppli G; Ekinci Y
Sci Adv; 2023 Apr; 9(16):eadf5997. PubMed ID: 37075116
[TBL] [Abstract][Full Text] [Related]
11. Silicon-based photonic crystals fabricated using proton beam writing combined with electrochemical etching method.
Dang Z; Breese MB; Recio-Sánchez G; Azimi S; Song J; Liang H; Banas A; Torres-Costa V; Martín-Palma RJ
Nanoscale Res Lett; 2012 Jul; 7(1):416. PubMed ID: 22824206
[TBL] [Abstract][Full Text] [Related]
12. Thermal Scanning-Probe Lithography for Broad-Band On-Demand Plasmonic Nanostructures on Transparent Substrates.
Ramò L; Giordano MC; Ferrando G; Canepa P; Telesio F; Repetto L; Buatier de Mongeot F; Canepa M; Bisio F
ACS Appl Nano Mater; 2023 Oct; 6(19):18623-18631. PubMed ID: 37854851
[TBL] [Abstract][Full Text] [Related]
13. Grayscale patterning of polymer thin films with nanometer precision by direct-write multiphoton photolithography.
Yao X; Ito T; Higgins DA
Langmuir; 2008 Aug; 24(16):8939-43. PubMed ID: 18646728
[TBL] [Abstract][Full Text] [Related]
14. Imprinted silicon-based nanophotonics.
Borel PI; Bilenberg B; Frandsen LH; Nielsen T; Fage-Pedersen J; Lavrinenko AV; Jensen JS; Sigmund O; Kristensen A
Opt Express; 2007 Feb; 15(3):1261-6. PubMed ID: 19532355
[TBL] [Abstract][Full Text] [Related]
15. Maskless lithography using silicon oxide etch-stop layer induced by megahertz repetition femtosecond laser pulses.
Kiani A; Venkatakrishnan K; Tan B; Venkataramanan V
Opt Express; 2011 May; 19(11):10834-42. PubMed ID: 21643340
[TBL] [Abstract][Full Text] [Related]
16. 3D Stretchable Arch Ribbon Array Fabricated via Grayscale Lithography.
Pang Y; Shu Y; Shavezipur M; Wang X; Mohammad MA; Yang Y; Zhao H; Deng N; Maboudian R; Ren TL
Sci Rep; 2016 Jun; 6():28552. PubMed ID: 27345766
[TBL] [Abstract][Full Text] [Related]
17. Fabrication of high aspect ratio tungsten nanostructures on ultrathin c-Si membranes for extreme UV applications.
Delachat F; Le Drogoff B; Constancias C; Delprat S; Gautier E; Chaker M; Margot J
Nanotechnology; 2016 Jan; 27(2):025304. PubMed ID: 26630379
[TBL] [Abstract][Full Text] [Related]
18. Phase masks for electron microscopy fabricated by thermal scanning probe lithography.
Hettler S; Radtke L; Grünewald L; Lisunova Y; Peric O; Brugger J; Bonanni S
Micron; 2019 Dec; 127():102753. PubMed ID: 31586831
[TBL] [Abstract][Full Text] [Related]
19. Negative Tone Metallic Organic Resists with Improved Sensitivity for Plasma Etching: Implications for Silicon Nanostructure Fabrication and Photomask Production.
Chaker A; Alty HA; Winpenny P; Whitehead GFS; Timco GA; Lewis SM; Winpenny REP
ACS Appl Nano Mater; 2022 Dec; 5(12):17538-17543. PubMed ID: 36583125
[TBL] [Abstract][Full Text] [Related]
20. Fabrication of a VO
Zhang W; Wu X; Li L; Zou C; Chen Y
ACS Appl Mater Interfaces; 2023 Mar; 15(10):13517-13525. PubMed ID: 36856296
[TBL] [Abstract][Full Text] [Related]
[Next] [New Search]