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4. Amorphous silicon waveguides and light modulators for integrated photonics realized by low-temperature plasma-enhanced chemical-vapor deposition. Cocorullo G; Corte FG; Rendina I; Minarini C; Rubino A; Terzini E Opt Lett; 1996 Dec; 21(24):2002-4. PubMed ID: 19881873 [TBL] [Abstract][Full Text] [Related]
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