These tools will no longer be maintained as of December 31, 2024. Archived website can be found here. PubMed4Hh GitHub repository can be found here. Contact NLM Customer Service if you have questions.


BIOMARKERS

Molecular Biopsy of Human Tumors

- a resource for Precision Medicine *

167 related articles for article (PubMed ID: 30934908)

  • 1. Design, Fabrication, and Testing of a Monolithically Integrated Tri-Axis High-Shock Accelerometer in Single (111)-Silicon Wafer.
    Cai S; Li W; Zou H; Bao H; Zhang K; Wang J; Song Z; Li X
    Micromachines (Basel); 2019 Mar; 10(4):. PubMed ID: 30934908
    [TBL] [Abstract][Full Text] [Related]  

  • 2. On-Chip Integration of Pressure Plus 2-Axis (X/Z) Acceleration Composite TPMS Sensors with a Single-Sided Bulk-Micromachining Technique.
    Wang J; Song F
    Micromachines (Basel); 2019 Jul; 10(7):. PubMed ID: 31311131
    [TBL] [Abstract][Full Text] [Related]  

  • 3. Silicon Micromachined TSVs for Backside Interconnection of Ultra-Small Pressure Sensors.
    Feng W; Li P; Zhang H; Sun K; Li W; Wang J; Yang H; Li X
    Micromachines (Basel); 2023 Jul; 14(7):. PubMed ID: 37512758
    [TBL] [Abstract][Full Text] [Related]  

  • 4. Design, fabrication, and testing of a bulk micromachined inertial measurement unit.
    Chang H; Shen Q; Zhou Z; Xie J; Jiang Q; Yuan W
    Sensors (Basel); 2010; 10(4):3835-56. PubMed ID: 22319329
    [TBL] [Abstract][Full Text] [Related]  

  • 5. Design, fabrication and characterization of monolithic embedded parylene microchannels in silicon substrate.
    Chen PJ; Shih CY; Tai YC
    Lab Chip; 2006 Jun; 6(6):803-10. PubMed ID: 16738734
    [TBL] [Abstract][Full Text] [Related]  

  • 6. An all-silicon single-wafer micro-g accelerometer with a combined surface and bulk micromachining process.
    Yazdi N; Najafi K
    J Microelectromech Syst; 2000 Dec; 9(4):544-50. PubMed ID: 12194180
    [TBL] [Abstract][Full Text] [Related]  

  • 7. Fabrication Technology and Characteristics Research of a Monolithically-Integrated 2D Magnetic Field Sensor Based on Silicon Magnetic Sensitive Transistors.
    Zhao X; Jin C; Deng Q; Lv M; Wen D
    Sensors (Basel); 2018 Aug; 18(8):. PubMed ID: 30081537
    [TBL] [Abstract][Full Text] [Related]  

  • 8. A wafer level vacuum encapsulated capacitive accelerometer fabricated in an unmodified commercial MEMS process.
    Merdassi A; Yang P; Chodavarapu VP
    Sensors (Basel); 2015 Mar; 15(4):7349-59. PubMed ID: 25815451
    [TBL] [Abstract][Full Text] [Related]  

  • 9. A Single-Side Micromachined MPa-Scale High-Temperature Pressure Sensor.
    Li P; Li W; Chen C; Wu S; Pan P; Sun K; Liu M; Wang J; Li X
    Micromachines (Basel); 2023 Apr; 14(5):. PubMed ID: 37241606
    [TBL] [Abstract][Full Text] [Related]  

  • 10. Novel high-performance piezoresistive shock accelerometer for ultra-high-g measurement utilizing self-support sensing beams.
    Jia C; Mao Q; Luo G; Zhao L; Lu D; Yang P; Yu M; Li C; Chang B; Jiang Z
    Rev Sci Instrum; 2020 Aug; 91(8):085001. PubMed ID: 32872922
    [TBL] [Abstract][Full Text] [Related]  

  • 11. Monolithic composite “pressure + acceleration + temperature + infrared” sensor using a versatile single-sided “SiN/Poly-Si/Al” process-module.
    Ni Z; Yang C; Xu D; Zhou H; Zhou W; Li T; Xiong B; Li X
    Sensors (Basel); 2013 Jan; 13(1):1085-101. PubMed ID: 23325169
    [TBL] [Abstract][Full Text] [Related]  

  • 12. Monolithic Multi Degree of Freedom (MDoF) Capacitive MEMS Accelerometers.
    Mohammed Z; Elfadel IAM; Rasras M
    Micromachines (Basel); 2018 Nov; 9(11):. PubMed ID: 30453536
    [TBL] [Abstract][Full Text] [Related]  

  • 13. Coupling Mechanism Analysis and Fabrication of Triaxial Gyroscopes in Monolithic MIMU.
    Xia D; Xu L
    Micromachines (Basel); 2017 Oct; 8(10):. PubMed ID: 30400499
    [TBL] [Abstract][Full Text] [Related]  

  • 14. Monolithically integrated triaxial high-performance micro accelerometers with position-independent pure axial stressed piezoresistive beams.
    Yu M; Zhao L; Chen S; Han X; Jia C; Xia Y; Wang X; Wang Y; Yang P; Lu D; Jiang Z
    Microsyst Nanoeng; 2023; 9():9. PubMed ID: 36644333
    [TBL] [Abstract][Full Text] [Related]  

  • 15. Piezoresistive temperature sensors fabricated by a surface micromachining CMOS MEMS process.
    Cai C; Tan J; Hua D; Qin M; Zhu N
    Sci Rep; 2018 Nov; 8(1):17065. PubMed ID: 30459315
    [TBL] [Abstract][Full Text] [Related]  

  • 16. Fabrication and Characterization of Monolithic Integrated Three-Axis Acceleration/Pressure/Magnetic Field Sensors.
    Wang Y; Xiao Y; Zhao X; Wen D
    Micromachines (Basel); 2024 Mar; 15(3):. PubMed ID: 38542659
    [TBL] [Abstract][Full Text] [Related]  

  • 17. Fabrication and Characteristics of a SOI Three-Axis Acceleration Sensor Based on MEMS Technology.
    Zhao X; Wang Y; Wen D
    Micromachines (Basel); 2019 Apr; 10(4):. PubMed ID: 30970643
    [TBL] [Abstract][Full Text] [Related]  

  • 18. Design of a Tri-Axial Surface Micromachined MEMS Vibrating Gyroscope.
    Crescenzi R; Castellito GV; Quaranta S; Balucani M
    Sensors (Basel); 2020 May; 20(10):. PubMed ID: 32429296
    [TBL] [Abstract][Full Text] [Related]  

  • 19. A MEMS Micro-g Capacitive Accelerometer Based on Through-Silicon-Wafer-Etching Process.
    Rao K; Wei X; Zhang S; Zhang M; Hu C; Liu H; Tu LC
    Micromachines (Basel); 2019 Jun; 10(6):. PubMed ID: 31181589
    [TBL] [Abstract][Full Text] [Related]  

  • 20. Micromachined Fluid Inertial Sensors.
    Liu S; Zhu R
    Sensors (Basel); 2017 Feb; 17(2):. PubMed ID: 28216569
    [TBL] [Abstract][Full Text] [Related]  

    [Next]    [New Search]
    of 9.