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4. Effects of Oxygen Flow during Fabrication by Magnetron Sputtering on Structure and Performance of Zr-Doped HfO Xi Y; Liu L; Zhao J; Qin X; Zhang J; Zhang C; Liu W Materials (Basel); 2023 Aug; 16(16):. PubMed ID: 37629850 [TBL] [Abstract][Full Text] [Related]
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