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5. On the formation of the porous structure in nanostructured a-Si coatings deposited by dc magnetron sputtering at oblique angles. Godinho V; Moskovkin P; Álvarez R; Caballero-Hernández J; Schierholz R; Bera B; Demarche J; Palmero A; Fernández A; Lucas S Nanotechnology; 2014 Sep; 25(35):355705. PubMed ID: 25120129 [TBL] [Abstract][Full Text] [Related]
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