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5. Micromachining of a bimorph Pb(Zr,Ti)O3 (PZT) cantilever using a micro-electromechanical systems (MEMS) process for energy harvesting application. Kim M; Hwang B; Jeong J; Min NK; Kwon KH J Nanosci Nanotechnol; 2012 Jul; 12(7):6011-5. PubMed ID: 22966699 [TBL] [Abstract][Full Text] [Related]
6. Micro Water Flow Measurement Using a Temperature-Compensated MEMS Piezoresistive Cantilever. Pommois R; Furusawa G; Kosuge T; Yasunaga S; Hanawa H; Takahashi H; Kan T; Aoyama H Micromachines (Basel); 2020 Jun; 11(7):. PubMed ID: 32629841 [TBL] [Abstract][Full Text] [Related]
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12. Performance of an Electrothermal MEMS Cantilever Resonator with Fano-Resonance Annoyance under Cigarette Smoke Exposure. Setiono A; Fahrbach M; Deutschinger A; Fantner EJ; Schwalb CH; Syamsu I; Wasisto HS; Peiner E Sensors (Basel); 2021 Jun; 21(12):. PubMed ID: 34198533 [TBL] [Abstract][Full Text] [Related]
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