189 related articles for article (PubMed ID: 32214010)
1. Research on a Micro-Processing Technology for Fabricating Complex Structures in Single-Crystal Quartz.
Han C; Li C; Zhao Y; Li B; Wei X
Micromachines (Basel); 2020 Mar; 11(3):. PubMed ID: 32214010
[TBL] [Abstract][Full Text] [Related]
2. Size-Effect-Based Dimension Compensations in Wet Etching for Micromachined Quartz Crystal Microstructures.
Dong Y; Dou G; Wei Z; Ji S; Dai H; Tang K; Sun L
Micromachines (Basel); 2024 Jun; 15(6):. PubMed ID: 38930754
[TBL] [Abstract][Full Text] [Related]
3. 25 nm Single-Crystal Silicon Nanowires Fabricated by Anisotropic Wet Etching.
Chu HM; Nguyen MV; Vu HN; Hane K
J Nanosci Nanotechnol; 2017 Feb; 17(2):1525-529. PubMed ID: 29688670
[TBL] [Abstract][Full Text] [Related]
4. Deep Reactive Ion Etching of Z-Cut Alpha Quartz for MEMS Resonant Devices Fabrication.
Li B; Li C; Zhao Y; Han C; Zhang Q
Micromachines (Basel); 2020 Jul; 11(8):. PubMed ID: 32722536
[TBL] [Abstract][Full Text] [Related]
5. Research on Trimming Frequency-Increasing Technology for Quartz Crystal Resonator Using Laser Etching.
Zhang JL; Liao S; Chen C; Yang XT; Lin SA; Tan F; Li B; Wang WW; Zhong ZX; Zeng GG
Micromachines (Basel); 2021 Jul; 12(8):. PubMed ID: 34442516
[TBL] [Abstract][Full Text] [Related]
6. Bio-inspired Fabrication of Complex Hierarchical Structure in Silicon.
Gao Y; Peng Z; Shi T; Tan X; Zhang D; Huang Q; Zou C; Liao G
J Nanosci Nanotechnol; 2015 Aug; 15(8):5918-23. PubMed ID: 26369172
[TBL] [Abstract][Full Text] [Related]
7. Silicon three-dimensional structures fabricated by femtosecond laser modification with dry etching.
Liu XQ; Yu L; Ma ZC; Chen QD
Appl Opt; 2017 Mar; 56(8):2157-2161. PubMed ID: 28375300
[TBL] [Abstract][Full Text] [Related]
8. Highly efficient damage-free correction of thickness distribution of quartz crystal wafers by atmospheric pressure plasma etching.
Yamamura K; Morikawa T; Ueda M; Nagano M; Zettsu N; Shibahara M
IEEE Trans Ultrason Ferroelectr Freq Control; 2009 Jun; 56(6):1128-30. PubMed ID: 19574119
[TBL] [Abstract][Full Text] [Related]
9. Wafer-scale synthesis of a morphologically controllable silicon ordered array as a platform and its SERS performance.
Song J; Feng S; Shi H; Han D; Liu G
RSC Adv; 2023 Nov; 13(48):33625-33633. PubMed ID: 38020018
[TBL] [Abstract][Full Text] [Related]
10. Fabrication of hierarchical micro/nanostructures via scanning probe lithography and wet chemical etching.
Choi I; Kim Y; Yi J
Ultramicroscopy; 2008 Sep; 108(10):1205-9. PubMed ID: 18583055
[TBL] [Abstract][Full Text] [Related]
11. Batch Fabrication of Silicon Nanometer Tip Using Isotropic Inductively Coupled Plasma Etching.
Wang L; Liu M; Zhao J; Zhao J; Zhu Y; Yang J; Yang F
Micromachines (Basel); 2020 Jun; 11(7):. PubMed ID: 32610624
[TBL] [Abstract][Full Text] [Related]
12. Wafer-scale fabrication of high-quality tunable gold nanogap arrays for surface-enhanced Raman scattering.
Le-The H; Lozeman JJA; Lafuente M; Muñoz P; Bomer JG; Duy-Tong H; Berenschot E; van den Berg A; Tas NR; Odijk M; Eijkel JCT
Nanoscale; 2019 Jul; 11(25):12152-12160. PubMed ID: 31194202
[TBL] [Abstract][Full Text] [Related]
13. Femtosecond laser-assisted fabrication of piezoelectrically actuated crystalline quartz-based MEMS resonators.
Linden J; Melech N; Sakaev I; Fogel O; Krylov S; Nuttman D; Zalevsky Z; Sirota M
Microsyst Nanoeng; 2023; 9():38. PubMed ID: 37007607
[TBL] [Abstract][Full Text] [Related]
14. Quartz-crystal scanning probe microcantilevers with a silicon tip based on direct bonding of silicon and quartz.
Takahashi A; Esashi M; Ono T
Nanotechnology; 2010 Oct; 21(40):405502. PubMed ID: 20829565
[TBL] [Abstract][Full Text] [Related]
15. Wet Etching of Quartz Using a Solution Based on Organic Solvents and Anhydrous Hydrofluoric Acid.
Wan Y; Luan X; Zhou L; Wu F
Materials (Basel); 2022 Sep; 15(18):. PubMed ID: 36143786
[TBL] [Abstract][Full Text] [Related]
16. Finishing of AT-cut quartz crystal wafer with nanometric thickness uniformity by pulse-modulated atmospheric pressure plasma etching.
Yamamura K; Ueda M; Shibahara M; Zettsu N
J Nanosci Nanotechnol; 2011 Apr; 11(4):2922-7. PubMed ID: 21776654
[TBL] [Abstract][Full Text] [Related]
17. The Hybrid Fabrication Process of Metal/Silicon Composite Structure for MEMS S&A Device.
Hu T; Fang K; Zhang Z; Jiang X; Zhao Y
Micromachines (Basel); 2019 Jul; 10(7):. PubMed ID: 31337075
[TBL] [Abstract][Full Text] [Related]
18. Electrochemical etching strategy for shaping monolithic 3D structures from 4H-SiC wafers.
Hochreiter A; Groß F; Möller MN; Krieger M; Weber HB
Sci Rep; 2023 Nov; 13(1):19086. PubMed ID: 37925526
[TBL] [Abstract][Full Text] [Related]
19. Curvature-Modulated Si Spherical Cap-Like Structure Fabricated by Multistep Ring Edge Etching.
Ma T; Wang J; Li D
Micromachines (Basel); 2020 Aug; 11(8):. PubMed ID: 32785149
[TBL] [Abstract][Full Text] [Related]
20. A Review: Inductively Coupled Plasma Reactive Ion Etching of Silicon Carbide.
Racka-Szmidt K; Stonio B; Żelazko J; Filipiak M; Sochacki M
Materials (Basel); 2021 Dec; 15(1):. PubMed ID: 35009277
[TBL] [Abstract][Full Text] [Related]
[Next] [New Search]