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4. A Novel MEMS Capacitive Microphone with Semiconstrained Diaphragm Supported with Center and Peripheral Backplate Protrusions. Shubham S; Seo Y; Naderyan V; Song X; Frank AJ; Johnson JTMG; da Silva M; Pedersen M Micromachines (Basel); 2021 Dec; 13(1):. PubMed ID: 35056187 [TBL] [Abstract][Full Text] [Related]
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