293 related articles for article (PubMed ID: 32604827)
1. Development of a High-Density Piezoelectric Micromachined Ultrasonic Transducer Array Based on Patterned Aluminum Nitride Thin Film.
Shin E; Yeo HG; Yeon A; Jin C; Park W; Lee SC; Choi H
Micromachines (Basel); 2020 Jun; 11(6):. PubMed ID: 32604827
[TBL] [Abstract][Full Text] [Related]
2. Design and Fabrication of High-Frequency Piezoelectric Micromachined Ultrasonic Transducer Based on an AlN Thin Film.
Zang J; Fan Z; Li P; Duan X; Wu C; Cui D; Xue C
Micromachines (Basel); 2022 Aug; 13(8):. PubMed ID: 36014238
[TBL] [Abstract][Full Text] [Related]
3. A Novel Nondestructive Testing Probe Using AlN-Based Piezoelectric Micromachined Ultrasonic Transducers (PMUTs).
Yin J; Zhou Z; Lou L
Micromachines (Basel); 2024 Feb; 15(3):. PubMed ID: 38542552
[TBL] [Abstract][Full Text] [Related]
4. Multiphysics Modeling and Analysis of Sc-Doped AlN Thin Film Based Piezoelectric Micromachined Ultrasonic Transducer by Finite Element Method.
Liu X; Zhang Q; Chen M; Liu Y; Zhu J; Yang J; Wang F; Tang Y; Zhao X
Micromachines (Basel); 2023 Oct; 14(10):. PubMed ID: 37893378
[TBL] [Abstract][Full Text] [Related]
5. 3D FEM Analysis of High-Frequency AlN-Based PMUT Arrays on Cavity SOI.
Liu W; He L; Wang X; Zhou J; Xu W; Smagin N; Toubal M; Yu H; Gu Y; Xu J; Remiens D; Ren J
Sensors (Basel); 2019 Oct; 19(20):. PubMed ID: 31615076
[TBL] [Abstract][Full Text] [Related]
6. High-SPL Air-Coupled Piezoelectric Micromachined Ultrasonic Transducers Based on 36% ScAlN Thin-Film.
Kusano Y; Ishii I; Kamiya T; Teshigahara A; Luo GL; Horsley DA
IEEE Trans Ultrason Ferroelectr Freq Control; 2019 Sep; 66(9):1488-1496. PubMed ID: 31180851
[TBL] [Abstract][Full Text] [Related]
7. Fabrication and DC-Bias Manipulation Frequency Characteristics of AlN-Based Piezoelectric Micromachined Ultrasonic Transducer.
Li T; Zhang L; Geng W; He J; Rao Y; Huo J; Yan K; Chou X
Micromachines (Basel); 2023 Jan; 14(1):. PubMed ID: 36677270
[TBL] [Abstract][Full Text] [Related]
8. Polyimide-On-Silicon 2D Piezoelectric Micromachined Ultrasound Transducer (PMUT) Array.
Joshi SV; Sadeghpour S; Kraft M
Sensors (Basel); 2023 May; 23(10):. PubMed ID: 37430741
[TBL] [Abstract][Full Text] [Related]
9. Design and 3D FEM Analysis of a Flexible Piezoelectric Micromechanical Ultrasonic Transducer Based on Sc-Doped AlN Film.
Ren Q; Chen J; Liu X; Zhang S; Gu Y
Sensors (Basel); 2022 Oct; 22(21):. PubMed ID: 36365796
[TBL] [Abstract][Full Text] [Related]
10. Equivalent Circuit Models of Cell and Array for Resonant Cavity-Based Piezoelectric Micromachined Ultrasonic Transducer.
Xu T; Zhao L; Jiang Z; Guo S; Li Z; Yang P; Luo G; Sun L; Zhang L
IEEE Trans Ultrason Ferroelectr Freq Control; 2020 Oct; 67(10):2103-2118. PubMed ID: 32396085
[TBL] [Abstract][Full Text] [Related]
11. Aluminum Nitride Piezoelectric Micromachined Ultrasound Transducer Arrays for Non-Invasive Monitoring of Radial Artery Stiffness.
Wu S; Liu K; Wang W; Li W; Wu T; Yang H; Li X
Micromachines (Basel); 2023 Feb; 14(3):. PubMed ID: 36984946
[TBL] [Abstract][Full Text] [Related]
12. ScAlN Film-Based Piezoelectric Micromechanical Ultrasonic Transducers with Dual-Ring Structure for Distance Sensing.
Zhang Y; Miao B; Wang G; Zhou H; Zhang S; Hu Y; Wu J; Yu X; Li J
Micromachines (Basel); 2023 Feb; 14(3):. PubMed ID: 36984923
[TBL] [Abstract][Full Text] [Related]
13. Evaluation of High Frequency Piezoelectric Micromachined Ultrasound Transducers for Photoacoustic Imaging.
Dangi A; Agrawal S; Tiwari S; Jadhav S; Cheng C; Trolier-McKinstry S; Pratap R; Kothapalli SR
Proc IEEE Sens; 2018 Oct; 2018():. PubMed ID: 31303903
[TBL] [Abstract][Full Text] [Related]
14. Piezoelectric Micromachined Ultrasound Transducer Technology: Recent Advances and Applications.
He Y; Wan H; Jiang X; Peng C
Biosensors (Basel); 2022 Dec; 13(1):. PubMed ID: 36671890
[TBL] [Abstract][Full Text] [Related]
15. Design, Characterization, and Analysis of PZT Micromachined Piezoelectric Ultrasonic Transducers With Good Coupling to Solids.
Xing Z; Ji W; Sun X; Chen Y; Du Y; Li X; Liu L
IEEE Trans Ultrason Ferroelectr Freq Control; 2020 Oct; 67(10):2135-2141. PubMed ID: 32746162
[TBL] [Abstract][Full Text] [Related]
16. Development of Dual-Frequency PMUT Arrays Based on Thin Ceramic PZT for Endoscopic Photoacoustic Imaging.
Wang H; Yang H; Chen Z; Zheng Q; Jiang H; Feng PX; Xie H
J Microelectromech Syst; 2021 Oct; 30(5):770-782. PubMed ID: 35528228
[TBL] [Abstract][Full Text] [Related]
17. PZT-Film-Based Piezoelectric Micromachined Ultrasonic Transducer with I-Shaped Composite Diaphragm.
Yu Q; Fan G; Ren W; Fan Q; Ti J; Li J; Wang C
Micromachines (Basel); 2022 Sep; 13(10):. PubMed ID: 36295950
[TBL] [Abstract][Full Text] [Related]
18. A Ceramic PZT-based PMUT Array for Endoscopic Photoacoustic Imaging.
Wang H; Chen Z; Yang H; Jiang H; Xie H
J Microelectromech Syst; 2020 Oct; 29(5):1038-1043. PubMed ID: 33746476
[TBL] [Abstract][Full Text] [Related]
19. AlScN Film Based Piezoelectric Micromechanical Ultrasonic Transducer for an Extended Long-Range Detection.
Yang H; Ji M; Xiu X; Lv H; Gu A; Zhang S
Micromachines (Basel); 2022 Nov; 13(11):. PubMed ID: 36363962
[TBL] [Abstract][Full Text] [Related]
20. Total-Focus Ultrasonic Imaging of Defects in Solids Using a PZT Piezoelectric Micromachined Ultrasonic Transducer Array.
Ji W; Liu L; Xing Z; Zhang D; Wang Y; Chen L; Chen Y; Sun X; Du Y
IEEE Trans Ultrason Ferroelectr Freq Control; 2021 Apr; 68(4):1380-1386. PubMed ID: 33090950
[TBL] [Abstract][Full Text] [Related]
[Next] [New Search]
