179 related articles for article (PubMed ID: 32977467)
1. Wafer-Level Vacuum-Packaged Translatory MEMS Actuator with Large Stroke for NIR-FT Spectrometers.
Sandner T; Gaumont E; Graßhoff T; Rieck A; Seifert T; Auböck G; Grahmann J
Micromachines (Basel); 2020 Sep; 11(10):. PubMed ID: 32977467
[TBL] [Abstract][Full Text] [Related]
2. On-Chip Micro-Electro-Mechanical System Fourier Transform Infrared (MEMS FT-IR) Spectrometer-Based Gas Sensing.
Erfan M; Sabry YM; Sakr M; Mortada B; Medhat M; Khalil D
Appl Spectrosc; 2016 May; 70(5):897-904. PubMed ID: 27044847
[TBL] [Abstract][Full Text] [Related]
3. H∞ Robust Control of a Large-Piston MEMS Micromirror for Compact Fourier Transform Spectrometer Systems.
Chen H; Li M; Zhang Y; Xie H; Chen C; Peng Z; Su S
Sensors (Basel); 2018 Feb; 18(2):. PubMed ID: 29419765
[TBL] [Abstract][Full Text] [Related]
4. [Design and implementation of a long wavelength near infrared spectrometer based on MEMS scanning mirror].
Ye KT; Dong TY; He WX; Li YX; Cheng XM; Li GY; Li HY; Xu HY
Guang Pu Xue Yu Guang Pu Fen Xi; 2014 Oct; 34(10):2858-62. PubMed ID: 25739238
[TBL] [Abstract][Full Text] [Related]
5. 2D Au-Coated Resonant MEMS Scanner for NIR Fluorescence Intraoperative Confocal Microscope.
Yao CY; Li B; Qiu Z
Micromachines (Basel); 2019 Apr; 10(5):. PubMed ID: 31052229
[TBL] [Abstract][Full Text] [Related]
6. A Fourier Transform Spectrometer Based on an Electrothermal MEMS Mirror with Improved Linear Scan Range.
Wang W; Chen J; Zivkovic AS; Xie H
Sensors (Basel); 2016 Sep; 16(10):. PubMed ID: 27690047
[TBL] [Abstract][Full Text] [Related]
7. Review of MEMS Based Fourier Transform Spectrometers.
Chai J; Zhang K; Xue Y; Liu W; Chen T; Lu Y; Zhao G
Micromachines (Basel); 2020 Feb; 11(2):. PubMed ID: 32093291
[TBL] [Abstract][Full Text] [Related]
8. A high-Q resonant pressure microsensor with through-glass electrical interconnections based on wafer-level MEMS vacuum packaging.
Luo Z; Chen D; Wang J; Li Y; Chen J
Sensors (Basel); 2014 Dec; 14(12):24244-57. PubMed ID: 25521385
[TBL] [Abstract][Full Text] [Related]
9. Operation of a MOEMS Deformable Mirror in Cryo: Challenges and Results.
Zamkotsian F; Lanzoni P; Barette R; Helmbrecht M; Marchis F; Teichman A
Micromachines (Basel); 2017 Jul; 8(8):. PubMed ID: 30400423
[TBL] [Abstract][Full Text] [Related]
10. Micro-Electro-Mechanical System Fourier Transform Infrared (MEMS FT-IR) Spectrometer Under Modulated-Pulsed Light Source Excitation.
Othman AM; Kotb HE; Sabry YM; Khalil D
Appl Spectrosc; 2020 Jul; 74(7):799-807. PubMed ID: 31617396
[TBL] [Abstract][Full Text] [Related]
11. Technological Platform for Vertical Multi-Wafer Integration of Microscanners and Micro-Optical Components.
Bargiel S; Baranski M; Wiemer M; Frömel J; Wang WS; Gorecki C
Micromachines (Basel); 2019 Mar; 10(3):. PubMed ID: 30871213
[TBL] [Abstract][Full Text] [Related]
12. [The principle and analysis of micro-Fourier transform spectrometer based on MEMS micro-mirror].
Chen JJ; Zhu Y; Liu B; Wei W; Zhang J; Wang N
Guang Pu Xue Yu Guang Pu Fen Xi; 2012 Nov; 32(11):3151-4. PubMed ID: 23387198
[TBL] [Abstract][Full Text] [Related]
13. Modeling and Optimization of a Novel ScAlN-Based MEMS Scanning Mirror with Large Static and Dynamic Two-Axis Tilting Angles.
Sun C; Liu Y; Li B; Su W; Luo M; Du G; Wu Y
Sensors (Basel); 2021 Aug; 21(16):. PubMed ID: 34450955
[TBL] [Abstract][Full Text] [Related]
14. Glass Frit Jetting for Advanced Wafer-Level Hermetic Packaging.
Roshanghias A; Bardong J; Binder A
Materials (Basel); 2022 Apr; 15(8):. PubMed ID: 35454479
[TBL] [Abstract][Full Text] [Related]
15. Optical Fourier transform based in-plane vibration characterization for MEMS comb structure.
Gao Y; Cao L; You Z; Zhao J; Zhang Z; Yang J
Opt Express; 2013 Feb; 21(4):5063-70. PubMed ID: 23482039
[TBL] [Abstract][Full Text] [Related]
16. Near-Infrared Grating Spectrometer for Mobile Phone Applications.
Pügner T; Knobbe J; Grüger H
Appl Spectrosc; 2016 May; 70(5):734-45. PubMed ID: 27170776
[TBL] [Abstract][Full Text] [Related]
17. Cost-Efficient Wafer-Level Capping for MEMS and Imaging Sensors by Adhesive Wafer Bonding.
Bleiker SJ; Visser Taklo MM; Lietaer N; Vogl A; Bakke T; Niklaus F
Micromachines (Basel); 2016 Oct; 7(10):. PubMed ID: 30404365
[TBL] [Abstract][Full Text] [Related]
18. Modelling and Experimental Verification of Step Response Overshoot Removal in Electrothermally-Actuated MEMS Mirrors.
Li M; Chen Q; Liu Y; Ding Y; Xie H
Micromachines (Basel); 2017 Sep; 8(10):. PubMed ID: 30400479
[TBL] [Abstract][Full Text] [Related]
19. Development of a Simultaneous Quantification Method for Multiple Modes of Nitrogen in Leaf Models Using Near-Infrared Spectroscopic Measurement.
Hashimoto A; Suehara KI; Kameoka T
Sensors (Basel); 2024 Feb; 24(4):. PubMed ID: 38400318
[TBL] [Abstract][Full Text] [Related]
20. [Micro Hadamard transform near-infrared spectrometer].
Zhang ZH; Muo XX; Guo YJ; Wang W
Guang Pu Xue Yu Guang Pu Fen Xi; 2011 Jul; 31(7):1975-9. PubMed ID: 21942064
[TBL] [Abstract][Full Text] [Related]
[Next] [New Search]
