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7. Probing the Atomic-Scale Structure of Amorphous Aluminum Oxide Grown by Atomic Layer Deposition. Young MJ; Bedford NM; Yanguas-Gil A; Letourneau S; Coile M; Mandia DJ; Aoun B; Cavanagh AS; George SM; Elam JW ACS Appl Mater Interfaces; 2020 May; 12(20):22804-22814. PubMed ID: 32309922 [TBL] [Abstract][Full Text] [Related]
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