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22. Random Access Addressing of MEMS Electrostatic Shutter Array for Multi-Object Astronomical Spectroscopy. Liu X; Takahashi T; Konishi M; Motohara K; Toshiyoshi H Micromachines (Basel); 2020 Aug; 11(8):. PubMed ID: 32824556 [TBL] [Abstract][Full Text] [Related]
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