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5. Combination of Plasma Electrolytic Processing and Mechanical Polishing for Single-Crystal 4H-SiC. Ma G; Li S; Liu X; Yin X; Jia Z; Liu F Micromachines (Basel); 2021 May; 12(6):. PubMed ID: 34071144 [TBL] [Abstract][Full Text] [Related]
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