These tools will no longer be maintained as of December 31, 2024. Archived website can be found here. PubMed4Hh GitHub repository can be found here. Contact NLM Customer Service if you have questions.
148 related articles for article (PubMed ID: 34835572)
21. Deep etching of single- and polycrystalline silicon with high speed, high aspect ratio, high uniformity, and 3D complexity by electric bias-attenuated metal-assisted chemical etching (EMaCE). Li L; Zhao X; Wong CP ACS Appl Mater Interfaces; 2014 Oct; 6(19):16782-91. PubMed ID: 25188875 [TBL] [Abstract][Full Text] [Related]
22. Wafer-level integration of self-aligned high aspect ratio silicon 3D structures using the MACE method with Au, Pd, Pt, Cu, and Ir. Franz M; Junghans R; Schmitt P; Szeghalmi A; Schulz SE Beilstein J Nanotechnol; 2020; 11():1439-1449. PubMed ID: 33029473 [TBL] [Abstract][Full Text] [Related]
23. Bulk micromachining of Si by metal-assisted chemical etching. Kim SM; Khang DY Small; 2014 Sep; 10(18):3761-6. PubMed ID: 24820931 [TBL] [Abstract][Full Text] [Related]
24. Curved Structure of Si by Improving Etching Direction Controllability in Magnetically Guided Metal-Assisted Chemical Etching. Kim TK; Bae JH; Kim J; Cho MK; Kim YC; Jin S; Chun D Micromachines (Basel); 2020 Jul; 11(8):. PubMed ID: 32751667 [TBL] [Abstract][Full Text] [Related]
25. In-Situ Fabrication of a Self-Aligned Selective Emitter Silicon Solar Cell Using the Gold Top Contacts To Facilitate the Synthesis of a Nanostructured Black Silicon Antireflective Layer Instead of an External Metal Nanoparticle Catalyst. Lu YT; Barron AR ACS Appl Mater Interfaces; 2015 Jun; 7(22):11802-14. PubMed ID: 25967127 [TBL] [Abstract][Full Text] [Related]
26. Voltage- and Metal-assisted Chemical Etching of Micro and Nano Structures in Silicon: A Comprehensive Review. Surdo S; Barillaro G Small; 2024 Apr; ():e2400499. PubMed ID: 38644330 [TBL] [Abstract][Full Text] [Related]
27. Enhanced Surface Properties of Light-Trapping Si Nanowires Using Synergetic Effects of Metal-Assisted and Anisotropic Chemical Etchings. Jeong Y; Hong C; Jung YH; Akter R; Yoon H; Yoon I Sci Rep; 2019 Nov; 9(1):15914. PubMed ID: 31685903 [TBL] [Abstract][Full Text] [Related]
28. Large-Scale Synthesis of Highly Uniform Silicon Nanowire Arrays Using Metal-Assisted Chemical Etching. Wendisch FJ; Rey M; Vogel N; Bourret GR Chem Mater; 2020 Nov; 32(21):9425-9434. PubMed ID: 33191979 [TBL] [Abstract][Full Text] [Related]
29. Deep Etching of Silicon Based on Metal-Assisted Chemical Etching. Nur'aini A; Oh I ACS Omega; 2022 May; 7(19):16665-16669. PubMed ID: 35601341 [TBL] [Abstract][Full Text] [Related]
30. Silicon Nanowires Synthesis by Metal-Assisted Chemical Etching: A Review. Leonardi AA; Faro MJL; Irrera A Nanomaterials (Basel); 2021 Feb; 11(2):. PubMed ID: 33546133 [TBL] [Abstract][Full Text] [Related]
32. Nanostructured silicon via metal assisted catalyzed etch (MACE): chemistry fundamentals and pattern engineering. Toor F; Miller JB; Davidson LM; Nichols L; Duan W; Jura MP; Yim J; Forziati J; Black MR Nanotechnology; 2016 Oct; 27(41):412003. PubMed ID: 27609489 [TBL] [Abstract][Full Text] [Related]
33. Direct Visualization of Etching Trajectories in Metal-Assisted Chemical Etching of Si by the Chemical Oxidation of Porous Sidewalls. Yoon SS; Khang DY Langmuir; 2015 Sep; 31(38):10549-54. PubMed ID: 26352208 [TBL] [Abstract][Full Text] [Related]
34. Fabrication of Ultra-High Aspect Ratio (>420:1) Al Li H; Xie C Micromachines (Basel); 2020 Apr; 11(4):. PubMed ID: 32260150 [TBL] [Abstract][Full Text] [Related]
35. Engineering Silicon to Porous Silicon and Silicon Nanowires by Metal-Assisted Chemical Etching: Role of Ag Size and Electron-Scavenging Rate on Morphology Control and Mechanism. Rajkumar K; Pandian R; Sankarakumar A; Rajendra Kumar RT ACS Omega; 2017 Aug; 2(8):4540-4547. PubMed ID: 31457746 [TBL] [Abstract][Full Text] [Related]
36. Tunable Surface Structuration of Silicon by Metal Assisted Chemical Etching with Pt Nanoparticles under Electrochemical Bias. Torralba E; Le Gall S; Lachaume R; Magnin V; Harari J; Halbwax M; Vilcot JP; Cachet-Vivier C; Bastide S ACS Appl Mater Interfaces; 2016 Nov; 8(45):31375-31384. PubMed ID: 27781426 [TBL] [Abstract][Full Text] [Related]
37. Formation of high aspect ratio GaAs nanostructures with metal-assisted chemical etching. DeJarld M; Shin JC; Chern W; Chanda D; Balasundaram K; Rogers JA; Li X Nano Lett; 2011 Dec; 11(12):5259-63. PubMed ID: 22049924 [TBL] [Abstract][Full Text] [Related]
38. Silver-assisted chemical etching on silicon with polyvinylpyrrolidone-mediated formation of silver dendrites. Chen CY; Hsiao PH Chemphyschem; 2015 Feb; 16(3):540-5. PubMed ID: 25521287 [TBL] [Abstract][Full Text] [Related]
39. In Situ PL and SPV Monitored Charge Carrier Injection During Metal Assisted Etching of Intrinsic a-Si Layers on c-Si. Greil SM; Rappich J; Korte L; Bastide S ACS Appl Mater Interfaces; 2015 Jun; 7(21):11654-9. PubMed ID: 25965159 [TBL] [Abstract][Full Text] [Related]
40. Catalytic nickel silicide as an alternative to noble metals in metal-assisted chemical etching of silicon. Kim K; Choi S; Bong H; Lee H; Kim M; Oh J Nanoscale; 2023 Aug; 15(33):13685-13691. PubMed ID: 37555310 [TBL] [Abstract][Full Text] [Related] [Previous] [Next] [New Search]