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2. Sapphire advanced mitigation process: wet etch to expose sub-surface damage and increase laser damage resistance and mechanical strength. Suratwala T; Steele R; Destino J; Wong L; Norton M; Laurence T; Aracne-Ruddle C; Miller P; Shen N; Feit M; Ray N; Carr W; Rivers C; Peters V; Jeppson S; Malone D; Greene W Appl Opt; 2020 Feb; 59(6):1602-1610. PubMed ID: 32225658 [TBL] [Abstract][Full Text] [Related]
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