161 related articles for article (PubMed ID: 36295914)
1. High Rate Deposition of Piezoelectric AlScN Films by Reactive Magnetron Sputtering from AlSc Alloy Targets on Large Area.
Barth S; Schreiber T; Cornelius S; Zywitzki O; Modes T; Bartzsch H
Micromachines (Basel); 2022 Sep; 13(10):. PubMed ID: 36295914
[TBL] [Abstract][Full Text] [Related]
2. Growth of Highly c-Axis Oriented AlScN Films on Commercial Substrates.
Su J; Fichtner S; Ghori MZ; Wolff N; Islam MR; Lotnyk A; Kaden D; Niekiel F; Kienle L; Wagner B; Lofink F
Micromachines (Basel); 2022 May; 13(5):. PubMed ID: 35630250
[TBL] [Abstract][Full Text] [Related]
3. Sputter deposition of stress-controlled piezoelectric AlN and AlScN films for ultrasonic and energy harvesting applications.
Barth S; Bartzsch H; Gloess D; Frach P; Herzog T; Walter S; Heuer H
IEEE Trans Ultrason Ferroelectr Freq Control; 2014 Aug; 61(8):1329-34. PubMed ID: 25073140
[TBL] [Abstract][Full Text] [Related]
4. Homogeneity and Thermal Stability of Sputtered Al
Carmona-Cejas JM; Mirea T; Nieto J; Olivares J; Felmetsger V; Clement M
Materials (Basel); 2023 Mar; 16(6):. PubMed ID: 36984049
[TBL] [Abstract][Full Text] [Related]
5. Process Control Monitor (PCM) for Simultaneous Determination of the Piezoelectric Coefficients
Zhang H; Wang Y; Wang L; Liu Y; Chen H; Wu Z
Micromachines (Basel); 2022 Apr; 13(4):. PubMed ID: 35457885
[TBL] [Abstract][Full Text] [Related]
6. Influence of ZnO Film Deposition Parameters on Piezoelectric Properties and Film-to-Substrate Adhesion on a GH4169 Superalloy Steel Substrate.
Mo G; Cui Y; Yin J; Gao P
Micromachines (Basel); 2022 Apr; 13(4):. PubMed ID: 35457943
[TBL] [Abstract][Full Text] [Related]
7. Effect of Substrate-RF on Sub-200 nm Al
Pirro M; Zhao X; Herrera B; Simeoni P; Rinaldi M
Micromachines (Basel); 2022 May; 13(6):. PubMed ID: 35744493
[TBL] [Abstract][Full Text] [Related]
8. Al
Luo Z; Shao S; Wu T
IEEE Trans Ultrason Ferroelectr Freq Control; 2022 Nov; 69(11):3108-3116. PubMed ID: 34914586
[TBL] [Abstract][Full Text] [Related]
9. Circular test structure for the determination of piezoelectric constants of Sc
Mayrhofer PM; Euchner H; Bittner A; Schmid U
Sens Actuators A Phys; 2015 Feb; 222():301-308. PubMed ID: 26109748
[TBL] [Abstract][Full Text] [Related]
10. Epitaxial Growth of Sc
Bartoli F; Streque J; Ghanbaja J; Pigeat P; Boulet P; Hage-Ali S; Naumenko N; Redjaïmia A; Aubert T; Elmazria O
Sensors (Basel); 2020 Aug; 20(16):. PubMed ID: 32824582
[TBL] [Abstract][Full Text] [Related]
11. Piezoelectric BiFeO
Micard Q; Condorelli GG; Malandrino G
Nanomaterials (Basel); 2020 Mar; 10(4):. PubMed ID: 32231101
[TBL] [Abstract][Full Text] [Related]
12. Characterization of Ferroelectric
Nie R; Shao S; Luo Z; Kang X; Wu T
Micromachines (Basel); 2022 Sep; 13(10):. PubMed ID: 36295981
[TBL] [Abstract][Full Text] [Related]
13. PZT/PZT and PZT/BiT Composite Piezo-Sensors in Aerospace SHM Applications: Photochemical Metal Organic + Infiltration Deposition and Characterization.
Hoshyarmanesh H; Ebrahimi N; Jafari A; Hoshyarmanesh P; Kim M; Park HH
Sensors (Basel); 2018 Dec; 19(1):. PubMed ID: 30577507
[TBL] [Abstract][Full Text] [Related]
14. Strongly Enhanced Piezoelectric Response in Lead Zirconate Titanate Films with Vertically Aligned Columnar Grains.
Nguyen MD; Houwman EP; Dekkers M; Rijnders G
ACS Appl Mater Interfaces; 2017 Mar; 9(11):9849-9861. PubMed ID: 28247756
[TBL] [Abstract][Full Text] [Related]
15. Laser Ultrasound Investigations of AlScN(0001) and AlScN(11-20) Thin Films Prepared by Magnetron Sputter Epitaxy on Sapphire Substrates.
Mayer EA; Rogall O; Ding A; Nair A; Žukauskaitė A; Pupyrev PD; Lomonosov AM; Mayer AP
Micromachines (Basel); 2022 Oct; 13(10):. PubMed ID: 36296051
[TBL] [Abstract][Full Text] [Related]
16. Structure and properties of Al-doped ZnO transparent conductive thin-films prepared by asymmetric bipolar pulsed DC reactive magnetron sputtering.
Hsu FY; Chen TH; Peng KC
J Nanosci Nanotechnol; 2009 Jul; 9(7):4008-15. PubMed ID: 19916401
[TBL] [Abstract][Full Text] [Related]
17. Exploring the Piezoelectric Properties of Bismuth Ferrite Thin Films Using Piezoelectric Force Microscopy: A Case Study.
Misiurev D; Kaspar P; Sobola D; Papež N; H Fawaeer S; Holcman V
Materials (Basel); 2023 Apr; 16(8):. PubMed ID: 37110039
[TBL] [Abstract][Full Text] [Related]
18. Large Piezoelectric Response in Lead-Free (Bi
Shimizu T; Hasegawa M; Ishihama K; Tateyama A; Yamaoka W; Tsurumaru R; Yoshimura S; Sato Y; Funakubo H
ACS Appl Mater Interfaces; 2021 Dec; 13(48):57532-57539. PubMed ID: 34813285
[TBL] [Abstract][Full Text] [Related]
19. A Comparative Study of Pt/Al
Islam MR; Schönweger G; Wolff N; Petraru A; Kohlstedt H; Fichtner S; Kienle L
ACS Appl Mater Interfaces; 2023 Sep; 15(35):41606-41613. PubMed ID: 37610983
[TBL] [Abstract][Full Text] [Related]
20. Evaluation of transverse piezoelectric coefficient of ZnO thin films deposited on different flexible substrates: a comparative study on the vibration sensing performance.
Joshi S; Nayak MM; Rajanna K
ACS Appl Mater Interfaces; 2014 May; 6(10):7108-16. PubMed ID: 24773266
[TBL] [Abstract][Full Text] [Related]
[Next] [New Search]