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8. Can We Rationally Design and Operate Spatial Atomic Layer Deposition Systems for Steering the Growth Regime of Thin Films? Vale JP; Sekkat A; Gheorghin T; Sevim S; Mavromanolaki E; Flouris AD; Pané S; Muñoz-Rojas D; Puigmartí-Luis J; Sotto Mayor T J Phys Chem C Nanomater Interfaces; 2023 May; 127(19):9425-9436. PubMed ID: 37223651 [TBL] [Abstract][Full Text] [Related]
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