These tools will no longer be maintained as of December 31, 2024. Archived website can be found here. PubMed4Hh GitHub repository can be found here. Contact NLM Customer Service if you have questions.
145 related articles for article (PubMed ID: 37630029)
1. A Highly Sensitive and High-Resolution Resonant MEMS Electrostatic Field Microsensor Based on Electrostatic Stiffness Perturbation. Liu X; Xia S; Peng C; Gao Y; Peng S; Zhang Z; Zhang W; Xing X; Liu Y Micromachines (Basel); 2023 Jul; 14(8):. PubMed ID: 37630029 [TBL] [Abstract][Full Text] [Related]
2. A Sensitivity-Enhanced Vertical-Resonant MEMS Electric Field Sensor Based on TGV Technology. Gao Y; Peng S; Liu X; Liu Y; Zhang W; Peng C; Xia S Micromachines (Basel); 2024 Feb; 15(3):. PubMed ID: 38542603 [TBL] [Abstract][Full Text] [Related]
3. Wafer-Level Vacuum-Packaged Electric Field Microsensor: Structure Design, Theoretical Model, Microfabrication, and Characterization. Liu J; Xia S; Peng C; Wu Z; Chu Z; Zhang Z; Lei H; Zheng F; Zhang W Micromachines (Basel); 2022 Jun; 13(6):. PubMed ID: 35744542 [TBL] [Abstract][Full Text] [Related]
4. A Resonant Pressure Microsensor Based on Double-Ended Tuning Fork and Electrostatic Excitation/Piezoresistive Detection. Shi X; Lu Y; Xie B; Li Y; Wang J; Chen D; Chen J Sensors (Basel); 2018 Aug; 18(8):. PubMed ID: 30071610 [TBL] [Abstract][Full Text] [Related]
5. An All-Silicon Resonant Pressure Microsensor Based on Eutectic Bonding. Chen S; Qin J; Lu Y; Xie B; Wang J; Chen D; Chen J Micromachines (Basel); 2023 Feb; 14(2):. PubMed ID: 36838141 [TBL] [Abstract][Full Text] [Related]
6. Design and Testing of a Non-Contact MEMS Voltage Sensor Based on Single-Crystal Silicon Piezoresistive Effect. Li J; Liu J; Peng C; Liu X; Wu Z; Zheng F Micromachines (Basel); 2022 Apr; 13(4):. PubMed ID: 35457923 [TBL] [Abstract][Full Text] [Related]
7. A Lateral Differential Resonant Pressure Microsensor Based on SOI-Glass Wafer-Level Vacuum Packaging. Xie B; Xing Y; Wang Y; Chen J; Chen D; Wang J Sensors (Basel); 2015 Sep; 15(9):24257-68. PubMed ID: 26402679 [TBL] [Abstract][Full Text] [Related]
8. Laterally Driven Resonant Pressure Sensor with Etched Silicon Dual Diaphragms and Combined Beams. Du X; Liu Y; Li A; Zhou Z; Sun D; Wang L Sensors (Basel); 2016 Jan; 16(2):158. PubMed ID: 26821031 [TBL] [Abstract][Full Text] [Related]
9. A Resonant Pressure Microsensor with Temperature Compensation Method Based on Differential Outputs and a Temperature Sensor. Xiang C; Lu Y; Yan P; Chen J; Wang J; Chen D Micromachines (Basel); 2020 Nov; 11(11):. PubMed ID: 33233469 [TBL] [Abstract][Full Text] [Related]
10. Design, Fabrication, and Dynamic Analysis of a MEMS Ring Resonator Supported by Twin Circular Curve Beams. Ranji AR; Nagesh G; Sun F; Ahamed MJ Sensors (Basel); 2024 Jul; 24(14):. PubMed ID: 39065896 [TBL] [Abstract][Full Text] [Related]
11. A Resonant Pressure Microsensor with a Wide Pressure Measurement Range. Xiang C; Lu Y; Cheng C; Wang J; Chen D; Chen J Micromachines (Basel); 2021 Apr; 12(4):. PubMed ID: 33916030 [TBL] [Abstract][Full Text] [Related]
12. Electrostatic-Fluid-Structure 3D Numerical Simulation of a MEMS Electrostatic Comb Resonator. Yu Z; Chen S; Mou Y; Hu F Sensors (Basel); 2022 Jan; 22(3):. PubMed ID: 35161817 [TBL] [Abstract][Full Text] [Related]
13. A high-Q resonant pressure microsensor with through-glass electrical interconnections based on wafer-level MEMS vacuum packaging. Luo Z; Chen D; Wang J; Li Y; Chen J Sensors (Basel); 2014 Dec; 14(12):24244-57. PubMed ID: 25521385 [TBL] [Abstract][Full Text] [Related]
14. A Resonant Pressure Sensor Based upon Electrostatically Comb Driven and Piezoresistively Sensed Lateral Resonators. Shi X; Zhang S; Chen D; Wang J; Chen J; Xie B; Lu Y; Li Y Micromachines (Basel); 2019 Jul; 10(7):. PubMed ID: 31288381 [TBL] [Abstract][Full Text] [Related]
15. A High Sensitivity Electric Field Microsensor Based on Torsional Resonance. Chu Z; Peng C; Ren R; Ling B; Zhang Z; Lei H; Xia S Sensors (Basel); 2018 Jan; 18(1):. PubMed ID: 29351210 [TBL] [Abstract][Full Text] [Related]
16. Resolution-Enhancing Structure for the Electric Field Microsensor Chip. Wen X; Yang P; Zhang Z; Chu Z; Peng C; Liu Y; Wu S; Zhang B; Zheng F Micromachines (Basel); 2021 Aug; 12(8):. PubMed ID: 34442558 [TBL] [Abstract][Full Text] [Related]
17. AC/DC Fields Demodulation Methods of Resonant Electric Field Microsensor. Yang P; Wen X; Chu Z; Ni X; Peng C Micromachines (Basel); 2020 May; 11(5):. PubMed ID: 32438559 [TBL] [Abstract][Full Text] [Related]
18. MEMS-on-fiber ultrasonic sensor with two resonant frequencies for partial discharges detection. Li H; Lv J; Li D; Xiong C; Zhang Y; Yu Y Opt Express; 2020 Jun; 28(12):18431-18439. PubMed ID: 32680041 [TBL] [Abstract][Full Text] [Related]
19. Structural Design and Testing of a Micromechanical Resonant Accelerometer. Liu H; Zhang Y; Wu J Micromachines (Basel); 2022 Aug; 13(8):. PubMed ID: 36014193 [TBL] [Abstract][Full Text] [Related]
20. Automatic Mode-Matching Method for MEMS Disk Resonator Gyroscopes Based on Virtual Coriolis Force. Ruan Z; Ding X; Qin Z; Jia J; Li H Micromachines (Basel); 2020 Feb; 11(2):. PubMed ID: 32085518 [TBL] [Abstract][Full Text] [Related] [Next] [New Search]