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5. A Resonant Z-Axis Aluminum Nitride Thin-Film Piezoelectric MEMS Accelerometer. Yang J; Zhang M; He Y; Su Y; Han G; Si C; Ning J; Yang F; Wang X Micromachines (Basel); 2019 Sep; 10(9):. PubMed ID: 31489954 [TBL] [Abstract][Full Text] [Related]
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