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7. Manufacture and characterization of graphene membranes with suspended silicon proof masses for MEMS and NEMS applications. Fan X; Smith AD; Forsberg F; Wagner S; Schröder S; Akbari SSA; Fischer AC; Villanueva LG; Östling M; Lemme MC; Niklaus F Microsyst Nanoeng; 2020; 6():17. PubMed ID: 34567632 [TBL] [Abstract][Full Text] [Related]
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10. Implementation of the CMOS MEMS condenser microphone with corrugated metal diaphragm and silicon back-plate. Huang CH; Lee CH; Hsieh TM; Tsao LC; Wu S; Liou JC; Wang MY; Chen LC; Yip MC; Fang W Sensors (Basel); 2011; 11(6):6257-69. PubMed ID: 22163953 [TBL] [Abstract][Full Text] [Related]
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