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2. Controlled Patterning of Vertical Silicon Structures Using Polymer Lithography and Wet Chemical Etching. Kim HJ; Lee SH; Lee J; Lee ES; Choi JH; Jung JY; Jeong JH; Choi DG J Nanosci Nanotechnol; 2015 Jun; 15(6):4522-9. PubMed ID: 26369075 [TBL] [Abstract][Full Text] [Related]
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