These tools will no longer be maintained as of December 31, 2024. Archived website can be found here. PubMed4Hh GitHub repository can be found here. Contact NLM Customer Service if you have questions.
23. Growth and properties of hafnicone and HfO(2)/hafnicone nanolaminate and alloy films using molecular layer deposition techniques. Lee BH; Anderson VR; George SM ACS Appl Mater Interfaces; 2014 Oct; 6(19):16880-7. PubMed ID: 25203487 [TBL] [Abstract][Full Text] [Related]
24. Molecular Layer Deposition of a Highly Stable Silicon Oxycarbide Thin Film Using an Organic Chlorosilane and Water. Closser RG; Bergsman DS; Bent SF ACS Appl Mater Interfaces; 2018 Jul; 10(28):24266-24274. PubMed ID: 29965720 [TBL] [Abstract][Full Text] [Related]
25. New s-Block Metal Pyridinedicarboxylate Network Structures through Gas-Phase Thin-Film Synthesis. Penttinen J; Nisula M; Karppinen M Chemistry; 2019 Sep; 25(49):11466-11473. PubMed ID: 31167042 [TBL] [Abstract][Full Text] [Related]
26. Nucleation and Conformality of Iridium and Iridium Oxide Thin Films Grown by Atomic Layer Deposition. Mattinen M; Hämäläinen J; Gao F; Jalkanen P; Mizohata K; Räisänen J; Puurunen RL; Ritala M; Leskelä M Langmuir; 2016 Oct; 32(41):10559-10569. PubMed ID: 27673703 [TBL] [Abstract][Full Text] [Related]
27. Atomic Layer Deposition of Intermetallic Fe Ghiyasi R; Philip A; Liu J; Julin J; Sajavaara T; Nolan M; Karppinen M Chem Mater; 2022 Jun; 34(11):5241-5248. PubMed ID: 35722201 [TBL] [Abstract][Full Text] [Related]
28. Rapid vapor-phase fabrication of organic-inorganic hybrid superlattices with monolayer precision. Lee BH; Ryu MK; Choi SY; Lee KH; Im S; Sung MM J Am Chem Soc; 2007 Dec; 129(51):16034-41. PubMed ID: 18047337 [TBL] [Abstract][Full Text] [Related]
29. Atomic Layer Deposition of Wet-Etch Resistant Silicon Nitride Using Di(sec-butylamino)silane and N Faraz T; van Drunen M; Knoops HC; Mallikarjunan A; Buchanan I; Hausmann DM; Henri J; Kessels WM ACS Appl Mater Interfaces; 2017 Jan; 9(2):1858-1869. PubMed ID: 28059494 [TBL] [Abstract][Full Text] [Related]
30. Plasma-assisted atomic layer deposition of conformal Pt films in high aspect ratio trenches. Erkens IJ; Verheijen MA; Knoops HC; Keuning W; Roozeboom F; Kessels WM J Chem Phys; 2017 Feb; 146(5):052818. PubMed ID: 28178848 [TBL] [Abstract][Full Text] [Related]
31. Atomic/Molecular Layer Deposition of Lithium Terephthalate Thin Films as High Rate Capability Li-Ion Battery Anodes. Nisula M; Karppinen M Nano Lett; 2016 Feb; 16(2):1276-81. PubMed ID: 26812433 [TBL] [Abstract][Full Text] [Related]
32. Thermal Annealing of Molecular Layer-Deposited Indicone Toward Area-Selective Atomic Layer Deposition. Lee S; Kim M; Baek G; Kim HM; Van TTN; Gwak D; Heo K; Shong B; Park JS ACS Appl Mater Interfaces; 2020 Sep; 12(38):43212-43221. PubMed ID: 32841556 [TBL] [Abstract][Full Text] [Related]
33. ALD/MLD processes for Mn and Co based hybrid thin films. Ahvenniemi E; Karppinen M Dalton Trans; 2016 Jun; 45(26):10730-5. PubMed ID: 27277668 [TBL] [Abstract][Full Text] [Related]
34. Low-temperature atomic layer deposition of copper metal thin films: self-limiting surface reaction of copper dimethylamino-2-propoxide with diethylzinc. Lee BH; Hwang JK; Nam JW; Lee SU; Kim JT; Koo SM; Baunemann A; Fischer RA; Sung MM Angew Chem Int Ed Engl; 2009; 48(25):4536-9. PubMed ID: 19444843 [TBL] [Abstract][Full Text] [Related]
36. Growth characteristics of Ti-based fumaric acid hybrid thin films by molecular layer deposition. Cao YQ; Zhu L; Li X; Cao ZY; Wu D; Li AD Dalton Trans; 2015 Sep; 44(33):14782-92. PubMed ID: 26219386 [TBL] [Abstract][Full Text] [Related]
37. Low-Temperature Conformal Atomic Layer Deposition of SiNx Films Using Si₂Cl₆ and NH₃ Plasma. Ovanesyan RA; Hausmann DM; Agarwal S ACS Appl Mater Interfaces; 2015 May; 7(20):10806-13. PubMed ID: 25927250 [TBL] [Abstract][Full Text] [Related]
38. Use of a New Non-Pyrophoric Liquid Aluminum Precursor for Atomic Layer Deposition. Xia X; Taylor A; Zhao Y; Guldin S; Blackman C Materials (Basel); 2019 May; 12(9):. PubMed ID: 31052512 [TBL] [Abstract][Full Text] [Related]
39. Chemical Bonding and Crystal Structure Schemes in Atomic/Molecular Layer Deposited Fe-Terephthalate Thin Films. Jussila T; Philip A; Rubio-Giménez V; Eklund K; Vasala S; Glatzel P; Lindén J; Motohashi T; Karttunen AJ; Ameloot R; Karppinen M Chem Mater; 2024 Jul; 36(13):6489-6503. PubMed ID: 39005530 [TBL] [Abstract][Full Text] [Related]
40. Deposition of thin films of organic-inorganic hybrid materials based on aromatic carboxylic acids by atomic layer deposition. Klepper KB; Nilsen O; Fjellvåg H Dalton Trans; 2010 Dec; 39(48):11628-35. PubMed ID: 21038067 [TBL] [Abstract][Full Text] [Related] [Previous] [Next] [New Search]