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4. 3D FEM Analysis of High-Frequency AlN-Based PMUT Arrays on Cavity SOI. Liu W; He L; Wang X; Zhou J; Xu W; Smagin N; Toubal M; Yu H; Gu Y; Xu J; Remiens D; Ren J Sensors (Basel); 2019 Oct; 19(20):. PubMed ID: 31615076 [TBL] [Abstract][Full Text] [Related]
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