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7. Crystallinity estimation of thin silicon-on-insulator layers by means of diffractometry using a highly parallel X-ray microbeam. Takeda S; Yokoyama K; Tsusaka Y; Kagoshima Y; Matsui J; Ogura A J Synchrotron Radiat; 2006 Sep; 13(Pt 5):373-7. PubMed ID: 16924133 [TBL] [Abstract][Full Text] [Related]
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