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  • Title: The reduction of the beam gas interactions in the variable pressure scanning electron microscope with the use of helium gas.
    Author: Adamiak B, Mathieu C.
    Journal: Scanning; 2000 May; 22(3):178-81. PubMed ID: 10888124.
    Abstract:
    This paper presents experimental observations on electron scattering by gases (helium and air) in the specimen chamber of a variable pressure scanning electron microscope. It shows an important reduction of the beam scattering with the use of helium gas, and the consequences for the x-ray microanalysis are discussed.
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