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  • Title: Micromachined oxygen gas sensors for microscopic energy consumption measurement systems.
    Author: Wu CC, Lee GB, Chen MH, Luo CH.
    Journal: J Med Eng Technol; 2005; 29(6):278-87. PubMed ID: 16287677.
    Abstract:
    Although the indirect calorimeter is a useful tool, its size and expense mean that it is seldom used in hospitals. Furthermore, its flow-through measurement technique dilutes respiratory variations, so they can only be detected with some form of high-precision instrumentation. This study employs MEMS techniques to develop an oxygen sensor as one part of a microscopic energy consumption measurement system, which measures respiration dynamics in a real time manner. The oxygen sensor comprises a polysilicon resistor and a Li-doped (2 wt%) tin-oxide sensing film attached to a thermally isolated silicon-nitride membrane. The power consumption of the sensor is less than 25 mW at an operating temperature of 150 degrees C. Furthermore, it measures oxygen concentrations between 25 and 85% with a linear output response. These characteristics render the proposed sensor suitable for use within a microscopic energy consumption measurement system in either hospital or homecare environments.
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